Development of automated tip preparation for atom probe tomography by using script-controlled FIB-SEM

Journal article

Creator

Jun Uzuhashi (author) (Search by this author)

https://orcid.org/0000-0003-2023-8158

National Institute for Materials Science

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Jun Uzuhashi ;

Tadakatsu Ohkubo (author) (Search by this author)

https://orcid.org/0000-0003-3548-1951

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Tadakatsu Ohkubo ;

Kazuhiro Hono (author) (Search by this author)

https://orcid.org/0000-0001-7367-0193

National Institute for Materials Science

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Kazuhiro Hono

Keyword

atom probe tomography, focused ion beam, scanning electron microscopy, automation

Date published

2023-02-19

Updated at

2025-02-23 22:51:16 +0900