Topology optimization for piezoresistive nanomechanical surface stress sensors in anisotropic 111> orientations.

Journal article

Creator

Kosuke Minami (author) (Search by this author)

https://orcid.org/0000-0003-4145-1118

RCMB, NIMS

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Kosuke Minami

Keyword

piezoresistive microcantilever, surface stress, topology optimization, nanomechanical sensors, anisotropic materials

Date published

2023-09-01

Updated at

2024-01-05 22:14:00 +0900