Bayesian estimation analysis of X-ray photoelectron spectra: Application to Si 2p spectrum analysis of oxidized silicon surfaces

Journal article

Creator

Hiroshi Shinotsuka (author) (Search by this author)

https://orcid.org/0000-0001-5147-1396

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Hiroshi Shinotsuka ;

Kenji Nagata (author) (Search by this author)

https://orcid.org/0000-0001-9894-4461

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Kenji Nagata ;

Hideki Yoshikawa (author) (Search by this author)

https://orcid.org/0000-0002-7389-8865

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Hideki Yoshikawa ;

Shuichi Ogawa (author) (Search by this author)

Shuichi Ogawa ;

Akitaka Yoshigoe (author) (Search by this author)

Akitaka Yoshigoe

Keyword

Bayesian estimation, X-ray photoelectron spectroscopy, Statistical analysis, Silicon surface oxidation

Date published

2024-12-03

Updated at

2025-01-21 12:30:34 +0900