Phase-selective sputter epitaxy of δ -NbN, γ -Nb4N3, and β -Nb2N on atomically flat AlN

Journal article

Creator

Yuki Kato (author) (Search by this author)

Yuki Kato ;

Koryo Masuzawa (author) (Search by this author)

Koryo Masuzawa ;

Takayuki Harada (author) (Search by this author)

https://orcid.org/0000-0002-8657-2258

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Takayuki Harada ;

Hideto Miyake (author) (Search by this author)

Hideto Miyake ;

Atsushi Kobayashi (author) (Search by this author)

Atsushi Kobayashi

Keyword

Thin films, Superconductivity, Nitrides

Date published

2026-05-14

Updated at

2026-06-16 11:26:56 +0900