Surface modification of aluminum on a silicon chip by citric acid treatment

Journal article

Creator

Moataz Mekawy (author) (Search by this author)

Moataz Mekawy ;

Kazuya Iida (author) (Search by this author)

Kazuya Iida ;

Akitsu Shigetou (author) (Search by this author)

https://orcid.org/0000-0001-7054-3674

NIMS Researchers Directory SAMURAI

Akitsu Shigetou ;

Jin Kawakita (author) (Search by this author)

https://orcid.org/0000-0002-4821-4150

NIMS Researchers Directory SAMURAI

Jin Kawakita

Keyword

Aluminum, Surface treatment, Citric acid, Sensor, Moisture

Date published

2025-08-18

Updated at

2025-08-25 12:30:35 +0900