Phase-selective sputter epitaxy of δ -NbN, γ -Nb4N3, and β -Nb2N on atomically flat AlN

ジャーナル論文

著者

Yuki Kato (author) (この著者で検索)

Yuki Kato ;

Koryo Masuzawa (author) (この著者で検索)

Koryo Masuzawa ;

Takayuki Harada (author) (この著者で検索)

https://orcid.org/0000-0002-8657-2258

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Takayuki Harada ;

Hideto Miyake (author) (この著者で検索)

Hideto Miyake ;

Atsushi Kobayashi (author) (この著者で検索)

Atsushi Kobayashi

キーワード

Thin films, Superconductivity, Nitrides

刊行年月日

2026-05-14

更新時刻

2026-06-16 11:26:56 +0900