Tailoring stresses in piezoresistive microcantilevers for enhanced surface stress sensing: insights from topology optimization

Journal article

Creator

Chao Zhuang (author) (Search by this author)

https://orcid.org/0000-0002-4469-5364

National Institute for Materials Science

Chao Zhuang ;

Kosuke Minami (author) (Search by this author)

https://orcid.org/0000-0003-4145-1118

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Kosuke Minami ;

Kota Shiba (author) (Search by this author)

https://orcid.org/0000-0001-7775-0318

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Kota Shiba ;

Genki Yoshikawa (author) (Search by this author)

https://orcid.org/0000-0002-9136-8964

National Institute for Materials Science

NIMS Researchers Directory SAMURAI

Genki Yoshikawa

Keyword

Topology optimization, nanomechanical sensors

Date published

2024-01-01

Updated at

2025-01-23 12:30:11 +0900