InP/GaInAsP多層膜におけるAES深さ分解能の温度依存性

Journal article

Creator

Ogiwara, Toshiya (author) (Search by this author)

https://orcid.org/0000-0002-7376-6571

NIMS Researchers Directory SAMURAI

Ogiwara, Toshiya ;

Tanuma, Shigeo (author) (Search by this author)

https://orcid.org/0000-0003-2628-9941

NIMS Researchers Directory SAMURAI

Tanuma, Shigeo

Keyword

Auger Depth Profiling Analysis, Depth Resolution, Sample Temperature, InP/GaInAsP多層膜

Date published

1995-05-17

Updated at

2022-10-03 01:44:22 +0900