# Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder

https://mdr.nims.go.jp/datasets/feeb1f18-3b3e-4481-b019-e106a66f5a68

## File

- [表面科学_32_2011_664.pdf](https://mdr.nims.go.jp/filesets/f89079a7-7306-491c-9929-1eeae91b2293/download) ([Detail](https://mdr.nims.go.jp/filesets/f89079a7-7306-491c-9929-1eeae91b2293.md))

## Id

feeb1f18-3b3e-4481-b019-e106a66f5a68

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2021-10-13T13:29:41.396329Z

## Updated at

2024-01-05T13:14:10.373459Z

## Published at

2021-11-16T10:30:53.644264Z

## Doi



## First published url

https://doi.org/10.1380/jsssj.32.664

## Date published

2011-10-24

## Recorded date published

2011

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion
    Beams at the Glancing Incidence using an Inclined Specimen Holder
  title_type: original
  lang: en

## Description

- description: 'We developed a 85°-high-angle inclined specimen holder which enabled
    the specimen surface to be irradiated by both electron and ion beams at the glancing
    incidence. We have investigated the high depth resolution Auger depth profiling
    analysis with the inclined specimen holder. In consequence, the resulting depth
    resolution for the GaAs/AlAs superlattice was found to be independent of the sputtered
    depth. The highest depth resolution of 1.7 nm was achieved with the Al-LVV Auger
    peak. The Auger depth profiles of the Si/Ge multiple delta-doped layers revealed
    that the Ge monolayer can be measured in-depth profiled with high sensitivity
    using this inclined specimen holder. '
  description_type: abstract
  lang: en

## Creator

- name: Ogiwara, Toshiya
  role: author
  orcid: https://orcid.org/0000-0002-7376-6571
- name: Nagatomi, Takaharu
  role: author
  orcid: https://orcid.org/0000-0002-3629-638X
- name: Kim, Kyung Joong
  role: author
  orcid: https://orcid.org/0000-0001-5559-9784
- name: Tanuma, Shigeo
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941

## Contact agent



## Publisher

organization: The Surface Science Society of Japan

## Managing organization



## Keyword

- subject: Auger Depth Profiling Analysis
  schema: not_defined
- subject: Si/Ge multiple delta-doped layers
  schema: not_defined
- subject: GaAs/AlAs Superlattice
  schema: not_defined
- subject: Inclined Holder
  schema: not_defined

## Rights



## Other identifier(s)



## Data origin



## Embargo



## Journal



## Conference



## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: f89079a7-7306-491c-9929-1eeae91b2293
  filename: 表面科学_32_2011_664.pdf
  content_type: application/pdf
  size: 916464
  md5: 9a134b0151c2ed438e81eee8b0cf9297

## Thumbnail

fileset_id: f89079a7-7306-491c-9929-1eeae91b2293
filename: 表面科学_32_2011_664.pdf