@misc{ogiwara2011a,
  title = {Ultra High Depth Resolution Auger Depth Profiling by Both Electron and Ion Beams at the Glancing Incidence using an Inclined Specimen Holder},
  author = {Ogiwara, Toshiya, Nagatomi, Takaharu, Kim, Kyung Joong, Tanuma, Shigeo},
  publisher = {The Surface Science Society of Japan},
  year = {2011-10-24},
  keywords = {Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder}
}