@article{monish,
  title = {Transfer of Freestanding Fluoropolymer Films for Advanced Semiconductor Devices},
  author = {Mohammad Monish, Koki Hino, Yosuke Sasama, Masato Urakami, Takehiro Ota, Kenji Sakamoto, Kenichiro Takakura, Yamaguchi Takahide},
  publisher = {American Chemical Society (ACS)},
  year = {2026},
  keywords = {freestanding fluoropolymer film, dielectric film transfer, low-κ dielectric, low interface trap density, diamond FET}
}