@misc{ogiwara2019a,
  title = {Raw data files for Fig. 11 Auger depth profiles in "Auger Depth Profiling Analysis of HfO2/Si Specimen Using an Ultra Low Angle Incidence Ion Beam"},
  author = {OGIWARA, Toshiya, NAGATA, Takahiro, YOSHIKAWA, Hideki},
  publisher = {},
  year = {2019-03-07},
  keywords = {Auger depth profiling analysis, HfO2/Si, Ultra low angle incidence ion beam}
}