# Visualization of Micro-level Leak Position of Filters and Vacuum Seals

https://mdr.nims.go.jp/datasets/fa63073f-5e3e-46f6-adda-1183b7b19710

## Files

- [2024_Itakura_VSS_67_20181383 (Jpn).pdf](https://mdr.nims.go.jp/filesets/5811480c-183e-4c0a-95bc-4c9c69f3ef16/download) ([Detail](https://mdr.nims.go.jp/filesets/5811480c-183e-4c0a-95bc-4c9c69f3ef16.md))

## Id

fa63073f-5e3e-46f6-adda-1183b7b19710

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-02-19T10:15:32.799777Z

## Updated at

2025-12-09T23:30:51.638736Z

## Published at

2025-12-09T23:23:54.910669Z

## Doi



## First published url

https://doi.org/10.1380/vss.67.608

## Date published

2024-12-10

## Recorded date published

2024

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Visualization of Micro-level Leak Position of Filters and Vacuum Seals
  title_type: original
  lang: en

## Description

- description: Operando hydrogen microscope (OHM) is an original hydrogen visualization
    equipment using electron stimulated desorption (ESD) method. In the equipment,
    permeated hydrogen atoms through the sample membrane are ionized by incident electron
    on the sample surface, desorbed into UHV environment and detected. By using the
    electron source of a scanning electron microscope (SEM) as the excitation source
    for ESD, we visualize the surface hydrogen distribution from the hydrogen desorption
    position. In the paper, we used OHM to visualize hydrogen leak position in standard
    conductance element (SCE), which is a filter of open type standard leak. As an
    example of measurement, we also identified the location of a leak in a sealing
    device.
  description_type: abstract
  lang: und

## Creator

- name: 板倉 明子
  role: author
  orcid: https://orcid.org/0000-0001-5783-141X
  organization: National Insutitute for Materials Science
  ror: https://ror.org/026v1ze26
- name: 宮内 直弥
  role: author
  orcid: https://orcid.org/0000-0002-7716-3049
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: 北島 正弘
  role: author
- name: 矢ヶ部 太郎
  role: author
  orcid: https://orcid.org/0000-0002-2244-5890
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: 吉田 肇
  role: author

## Contact agent



## Publisher

organization: Surface Science Society Japan

## Managing organization



## Keyword

- subject: Hydrogen
  schema: not_defined
- subject: Visualization
  schema: not_defined
- subject: micro leakage
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2024-12-10
end_date: 2025-12-10

## Journal

- title: Vacuum and Surface Science
  issn: '24335835'
  volume: '67'
  issue: '12'
  start_page: 608
  end_page: 614
  article_number: '20181383'

## Conference



## Related item



## Funding

- identifier: 18H03849
  funder_name: JSPS

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 5811480c-183e-4c0a-95bc-4c9c69f3ef16
  filename: 2024_Itakura_VSS_67_20181383 (Jpn).pdf
  content_type: application/pdf
  size: 4846049
  md5: 3e7f1533ac5e353c10ed12193912ab45

## Thumbnail

fileset_id: 5811480c-183e-4c0a-95bc-4c9c69f3ef16
filename: 2024_Itakura_VSS_67_20181383 (Jpn).pdf