# Development of automated tip preparation for atom probe tomography by using script-controlled FIB-SEM

https://mdr.nims.go.jp/datasets/f6f171ce-4744-4c99-8be7-2bb30613b383

## File

- [Development of automated tip preparation for atom probe tomography by using script-controlled FIB-SEM.pdf](https://mdr.nims.go.jp/filesets/a449dae9-d330-42f6-b3a1-a50967711915/download) ([Detail](https://mdr.nims.go.jp/filesets/a449dae9-d330-42f6-b3a1-a50967711915.md))

## Id

f6f171ce-4744-4c99-8be7-2bb30613b383

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-07-03T08:24:08.623243Z

## Updated at

2025-02-23T13:51:16.508732Z

## Published at

2025-02-23T13:51:16.620236Z

## Doi

https://doi.org/10.48505/nims.4208

## First published url

https://doi.org/10.1016/j.ultramic.2023.113704

## Date published

2023-02-19

## Recorded date published

2023-5

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Development of automated tip preparation for atom probe tomography by using
    script-controlled FIB-SEM
  title_type: original
  lang: en

## Description

- description: Atom probe tomography (APT) has become a popular technique for microstructural
    analysis of a wide range of alloys and devices over the past two decades owing
    to the employment of laser-assisted field evaporation and the development of site-specific
    tip preparation using a focused ion beam (FIB) with a scanning electron microscopy
    (SEM) system. In laser-assisted field evaporation, laser irradiation conditions
    largely influence mass resolution; therefore, recent commercial APT instruments
    allow strict control of the analysis conditions. However, the mass resolution
    is affected not only by the laser condition but also by the thermal conductivity
    of the material and the tip shape. In addition, it is also important to keep the
    tip shape constant in order to obtain tomography data with good reproducibility
    since the analytical volume highly depends on the tip shape. In this study, we
    have developed a method to fabricate the tip with the desired shape automatically
    by using a script-controlled FIB-SEM system, which has traditionally depended
    on the skill of the FIB-SEM operator. The tip shape was then intentionally changed
    by using this method, and its effect on the APT data is also discussed.
  description_type: abstract
  lang: eng

## Creator

- name: Jun Uzuhashi
  role: author
  orcid: https://orcid.org/0000-0003-2023-8158
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Tadakatsu Ohkubo
  role: author
  orcid: https://orcid.org/0000-0003-3548-1951
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Kazuhiro Hono
  role: author
  orcid: https://orcid.org/0000-0001-7367-0193
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26

## Contact agent



## Publisher

organization: Elsevier BV

## Managing organization



## Keyword

- subject: atom probe tomography
  schema: not_defined
- subject: focused ion beam
  schema: not_defined
- subject: scanning electron microscopy
  schema: not_defined
- subject: automation
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc-nd/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2023-02-20
end_date: 2025-02-21

## Journal

- title: ULTRAMICROSCOPY
  issn: '03043991'
  volume: '247'
  start_page: 113704
  end_page: 113704

## Conference



## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: a449dae9-d330-42f6-b3a1-a50967711915
  filename: Development of automated tip preparation for atom probe tomography by
    using script-controlled FIB-SEM.pdf
  content_type: application/pdf
  size: 2262914
  md5: 2e396fd93fb49308c4550761c1594e58

## Thumbnail

fileset_id: a449dae9-d330-42f6-b3a1-a50967711915
filename: Development of automated tip preparation for atom probe tomography by using
  script-controlled FIB-SEM.pdf