# Topology optimization for piezoresistive nanomechanical surface stress sensors in anisotropic 111> orientations.

https://mdr.nims.go.jp/datasets/f647ad07-7a62-4ca7-9a67-792067e6c7b4

## File

- [Zhuang_2023_Nano_Express_4_035007.pdf](https://mdr.nims.go.jp/filesets/9c35a6ea-542b-4470-ba96-aa5282e2a870/download) ([Detail](https://mdr.nims.go.jp/filesets/9c35a6ea-542b-4470-ba96-aa5282e2a870.md))

## Id

f647ad07-7a62-4ca7-9a67-792067e6c7b4

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-11-30T05:11:22.640059Z

## Updated at

2024-01-05T13:14:00.445037Z

## Published at

2023-12-04T04:30:24.273945Z

## Doi



## First published url

https://doi.org/10.1088/2632-959X/acef44

## Date published

2023-09-01

## Recorded date published

2023-9-1

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Topology optimization for piezoresistive nanomechanical surface stress sensors
    in anisotropic <111> orientations.
  title_type: original
  lang: en

## Description

- description: 'MEMS-based piezoresistive nanomechanical sensors are compact sensing
    platforms widely employed in vapor sensing, environmental monitoring, and biosensing.
    Despite their extensive utility, their lower sensitivity relative to their optical
    readout counterparts has been a limiting factor, constraining the wider application
    of this technology. Prior research has suggested that alternative silicon orientations,
    such as 〈111〉 orientations in (110) wafers, can significantly improve the sensitivity
    of piezoresistive sensors. However, the complexity of optimizing two-dimensional
    stress distribution and handling anisotropic elasticity has made device design
    a formidable task, leaving this promising avenue largely unexplored. To address
    this challenge, we employ density-based topology optimization to generate a series
    of optimized designs for piezoresistive nanomechanical sensors manufactured along
    〈111〉 orientations. Our study reveals a transition in optimized designs from a
    double-cantilever configuration to a suspended platform configuration, dictated
    by the stiffness ratio between the immobilization layer and the silicon layer.
    This transition is attributed to the shift in the neutral plane and the prevailing
    stress relaxation mechanism. '
  description_type: abstract
  lang: eng

## Creator

- name: Kosuke Minami
  role: author
  orcid: https://orcid.org/0000-0003-4145-1118
  organization: NIMS
  department: RCMB

## Contact agent



## Publisher

organization: IOP Publishing

## Managing organization



## Keyword

- subject: piezoresistive microcantilever
  schema: not_defined
- subject: surface stress
  schema: not_defined
- subject: topology optimization
  schema: not_defined
- subject: nanomechanical sensors
  schema: not_defined
- subject: anisotropic materials
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Nano Express
  issn: 2632959X
  volume: '4'
  issue: '3'
  start_page: 35007
  end_page: 35007

## Conference



## Related item



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## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



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## Custom property



## Fileset

- id: 9c35a6ea-542b-4470-ba96-aa5282e2a870
  filename: Zhuang_2023_Nano_Express_4_035007.pdf
  content_type: application/pdf
  size: 1765942
  md5: 731f12080e26f0da8c95902ae85ec874

## Thumbnail

fileset_id: 9c35a6ea-542b-4470-ba96-aa5282e2a870
filename: Zhuang_2023_Nano_Express_4_035007.pdf