@misc{kosuke2023a, title = {Topology optimization for piezoresistive nanomechanical surface stress sensors in anisotropic <111> orientations.}, author = {Kosuke Minami}, publisher = {IOP Publishing}, year = {2023-09-01}, keywords = {piezoresistive microcantilever, surface stress, topology optimization, nanomechanical sensors, anisotropic materials} }