@misc{ryo2023a,
  title = {Development of p-type Ion Implantation Technique for Realization of GaN Vertical MOSFETs},
  author = {Ryo Tanaka, Shinya Takashima, Katsunori Ueno, Masahiro Horita, Jun Suda, Jun Uzuhashi, Tadakatsu Ohkubo, Masaharu Edo},
  publisher = {IEEE},
  year = {2023-06-08},
  keywords = {gallium nitride, atom probe tomography, transmission electron microscopy}
}