# On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin Film

https://mdr.nims.go.jp/datasets/f4a8a5a6-3540-4874-a7f0-2069170a14d2

## File

- [AFM-resonator_sensor-20230307　.pdf](https://mdr.nims.go.jp/filesets/c4359b5b-2f89-4bf4-bcbf-95231f865f0b/download) ([Detail](https://mdr.nims.go.jp/filesets/c4359b5b-2f89-4bf4-bcbf-95231f865f0b.md))

## Id

f4a8a5a6-3540-4874-a7f0-2069170a14d2

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-11-29T05:27:35.468152Z

## Updated at

2024-07-04T07:30:34.970615Z

## Published at

2024-07-04T07:30:35.081993Z

## Doi

https://doi.org/10.48505/nims.4273

## First published url

https://doi.org/10.1002/adfm.202300805

## Date published

2023-03-27

## Recorded date published

2023-7

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: On-chip Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive
    Thin Film
  title_type: original
  lang: en

## Description

- description: Electrically integrable, high-sensitivity, and high-reliability magnetic
    sensors are not yet realized at high temperatures (500 °C). In this study, an
    integrated on-chip single-crystal diamond (SCD) micro-electromechanical system
    (MEMS) magnetic transducer is demonstrated by coupling SCD with a large magnetostrictive
    FeGa film. The FeGa film is multifunctionalized to actuate the resonator, self-sense
    the external magnetic field, and electrically readout the resonance signal. The
    on-chip SCD MEMS transducer shows a high sensitivity of 3.2 Hz mT−1 from room
    temperature to 500 °C and a low noise level of 9.45 nT Hz−1/2 up to 300 °C. The
    minimum fluctuation of the resonance frequency is 1.9 × 10−6 at room temperature
    and 2.3 × 10−6 at 300 °C. An SCD MEMS resonator array with parallel electric readout
    is subsequently achieved, thus providing a basis for the development of magnetic
    image sensors. The present study facilitates the development of highly integrated
    on-chip MEMS resonator transducers with high performance and high thermal stability.
  description_type: abstract
  lang: eng

## Creator

- name: Zilong Zhang
  role: author
  orcid: https://orcid.org/0000-0002-9759-9253
  organization: National Institute for Materials Science
- name: Wen Zhao
  role: author
- name: Guo Chen
  role: author
  organization: National Institute for Materials Science
- name: Masaya Toda
  role: author
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
  organization: National Institute for Materials Science
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science

## Contact agent



## Publisher

organization: Wiley

## Managing organization



## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined
- subject: Magnetic sensors
  schema: not_defined

## Rights

- description: 'This is the peer reviewed version of the following article: On-chip
    Diamond MEMS Magnetic Sensing through Multifunctionalized Magnetostrictive Thin
    Film, which has been published in final form at https://doi.org/10.1002/adfm.202300805.
    This article may be used for non-commercial purposes in accordance with Wiley
    Terms and Conditions for Use of Self-Archived Versions. This article may not be
    enhanced, enriched or otherwise transformed into a derivative work, without express
    permission from Wiley or by statutory rights under applicable legislation. Copyright
    notices must not be removed, obscured or modified. The article must be linked
    to Wiley’s version of record on Wiley Online Library and any embedding, framing
    or otherwise making available the article or pages thereof by third parties from
    platforms, services and websites other than Wiley Online Library must be prohibited.'
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2023-07-04
end_date: 2024-07-04

## Journal

- title: ADVANCED FUNCTIONAL MATERIALS
  issn: 1616301X
  volume: '33'
  issue: '27'
  start_page: 2300805
  end_page: 2300805

## Conference



## Related item



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## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



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## Custom property



## Fileset

- id: c4359b5b-2f89-4bf4-bcbf-95231f865f0b
  filename: AFM-resonator_sensor-20230307　.pdf
  content_type: application/pdf
  size: 1593916
  md5: e7e504ce3143c769ac1d16ab2e72d614

## Thumbnail

fileset_id: c4359b5b-2f89-4bf4-bcbf-95231f865f0b
filename: AFM-resonator_sensor-20230307　.pdf