# Disclosing surface adsorptions of oxygen- and hydrogen-terminated diamond via MEMS

https://mdr.nims.go.jp/datasets/f408d6b7-d6a4-4abb-a041-e541426360ae

## File

- [Keyun gu Japanese diamond meeting　Liao R1.pdf](https://mdr.nims.go.jp/filesets/f29ed737-59c9-45f7-bf11-bde181c40bb2/download) ([Detail](https://mdr.nims.go.jp/filesets/f29ed737-59c9-45f7-bf11-bde181c40bb2.md))

## Id

f408d6b7-d6a4-4abb-a041-e541426360ae

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-12-02T06:19:33.923671Z

## Updated at

2024-12-04T23:30:45.475207Z

## Published at

2024-12-04T23:30:45.555826Z

## Doi

https://doi.org/10.48505/nims.5089

## First published url



## Date published



## Recorded date published



## Resource type

conference_presentation

## Manuscript type

na

## Collection



## Title

- title: 単結晶ダイヤモンドMEMSによる酸素および水素終端表面吸着と脱着の解明
  title_type: alternative
  lang: ja
- title: Disclosing surface adsorptions of oxygen- and hydrogen-terminated diamond
    via MEMS
  title_type: original
  lang: en

## Description

- description: In this work, we fabricated SCD resonators and clarified the desorption
    characteristics of O-terminated and H-terminated diamond by in situ heating the
    cantilevers and measuring the resonance frequencies of cantilevers.
  description_type: abstract
  lang: eng

## Creator

- name: 顧 克云
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: ジャン ジロン
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: 陳 果
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: ザオ ウェン
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Jian Huang
  role: author
  organization: Shanghai University
- name: 小泉 聡
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: 小出 康夫
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials
- name: 廖 梅勇
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group

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## Keyword

- subject: Diamond, MEMS
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal



## Conference

name: 第３８回ダイヤモンドシンポジウム
start_date: 2024-11-20
end_date: 2024-11-22
identifier: https://jndf.org/katsudo/symposium/sympo-38th.html

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## Measurement method



## Specimen



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## Fileset

- id: f29ed737-59c9-45f7-bf11-bde181c40bb2
  filename: Keyun gu Japanese diamond meeting　Liao R1.pdf
  content_type: application/pdf
  size: 620241
  md5: fc3b55bd75172a8ad4f0595a43f5985f

## Thumbnail

fileset_id: f29ed737-59c9-45f7-bf11-bde181c40bb2
filename: Keyun gu Japanese diamond meeting　Liao R1.pdf