@misc{emi2022a,
  title = {Atomic resolution analysis of extended defects and Mg agglomeration in Mg-ion-implanted GaN and their impacts on acceptor formation},
  author = {Emi Kano, Keita Kataoka, Jun Uzuhashi, Kenta Chokawa, Hideki Sakurai, Akira Uedono, Tetsuo Narita, Kacper Sierakowski, Michal Bockowski, Ritsuo Otsuki, Koki Kobayashi, Yuta Itoh, Masahiro Nagao, Tadakatsu Ohkubo, Kazuhiro Hono, Jun Suda, Tetsu Kachi, Nobuyuki Ikarashi},
  publisher = {AIP Publishing},
  year = {2022-08-14},
  keywords = {gallium nitride, transmission electron microscopy, atom probe tomography}
}