# Iterative composition optimization in <math>  <mrow>    <msub>      <mi>Fe</mi>      <mn>2</mn>    </msub>    <mi>VA</mi>    <mn>1</mn>  </mrow></math>–based thin-film thermoelectrics using single-target sputtering

https://mdr.nims.go.jp/datasets/f1579143-14e5-487a-8460-76a8f02bf6ed

## Files

- [MDR-Iterative-Manuscript-Alex.pdf](https://mdr.nims.go.jp/filesets/21cd3e93-73bc-45f7-aa35-e12607bcddd8/download) ([Detail](https://mdr.nims.go.jp/filesets/21cd3e93-73bc-45f7-aa35-e12607bcddd8.md))

## Id

f1579143-14e5-487a-8460-76a8f02bf6ed

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-10-07T02:34:28.673092Z

## Updated at

2024-10-09T23:30:33.593337Z

## Published at

2024-10-09T23:30:33.658273Z

## Doi

https://doi.org/10.48505/nims.4818

## First published url

https://doi.org/10.1103/physrevmaterials.8.095402

## Date published

2024-09-25

## Recorded date published

2024-9

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: "Iterative composition optimization in \n<mml:math xmlns:mml=\"http://www.w3.org/1998/Math/MathML\"><mml:mrow><mml:msub><mml:mi>Fe</mml:mi><mml:mn>2</mml:mn></mml:msub><mml:mi>VA</mml:mi><mml:mn>1</mml:mn></mml:mrow></mml:math>\n–based
    thin-film thermoelectrics using single-target sputtering"
  title_type: original
  lang: en

## Description

- description: "Magnetron sputtering inherently exhibits the advantage of dislodging
    particles from the target in a ratio\r\nequivalent to the target stoichiometry.
    Nevertheless, film compositions often deviate due to element-dependent scattering
    with the working gas, necessitating the adjustment of the sputtering process.
    In this work, we explore an unconventional approach to addressing this issue,
    involving the employment of an off-stoichiometric target. The required composition
    is obtained through an iterative process, which is demonstrated by Fe2VAl and
    Fe2V0.9Ti0.1Al films as case studies. Ultimately, the correct stoichiometry is
    obtained from Fe1.86V1.15Al0.99 and Fe1.88V1.02Ti0.13Al0.97 targets, respectively.
    Despite the thermoelectric properties falling below expectations, mainly due to
    imperfect film crystallization, the strategy successfully achieved the desired
    stoichiometry, enabling accurate film synthesis without the need for advanced
    sputtering setups."
  description_type: abstract
  lang: und

## Creator

- name: A. Riss
  role: author
  orcid: https://orcid.org/0000-0002-9707-8394
- name: E. Lasisch
  role: author
- name: S. Podbelsek
  role: author
- name: K. Schäfer
  role: author
  orcid: https://orcid.org/0009-0006-8641-6665
- name: M. Parzer
  role: author
  orcid: https://orcid.org/0000-0003-3509-7474
- name: F. Garmroudi
  role: author
  orcid: https://orcid.org/0000-0002-0088-1755
- name: C. Eisenmenger-Sittner
  role: author
  orcid: https://orcid.org/0000-0002-7096-6092
- name: T. Mori
  role: author
  orcid: https://orcid.org/0000-0003-2682-1846
- name: E. Bauer
  role: author

## Contact agent



## Publisher

organization: American Physical Society (APS)

## Managing organization



## Keyword

- subject: thermoelectric
  schema: not_defined

## Rights

- description: "©2024 American Physical Society"
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin



## Embargo



## Journal

- title: Physical Review Materials
  issn: '24759953'
  volume: '8'
  issue: '9'
  article_number: '095402'

## Conference



## Related item



## Funding

- identifier: JPMJMI19A1
  funder_name: Japan Science and Technology Agency

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 21cd3e93-73bc-45f7-aa35-e12607bcddd8
  filename: MDR-Iterative-Manuscript-Alex.pdf
  content_type: application/pdf
  size: 1437419
  md5: 8b24e227ea5df0e2e00460d9047fbeee

## Thumbnail

fileset_id: 21cd3e93-73bc-45f7-aa35-e12607bcddd8
filename: MDR-Iterative-Manuscript-Alex.pdf