# Calculations of Electron Inelastic Mean Free Paths IV. Evaluation of calculated IMFPs and of the predictive IMFP formula TPP-2 for electron energies between 50 and 2000 eV

https://mdr.nims.go.jp/datasets/f126e446-0373-44c0-82f3-d2da4cd79ed0

## File

- [IMFP IV AMS.pdf](https://mdr.nims.go.jp/filesets/0b9ee82a-585c-44f9-b464-434c8a3dba64/download) ([Detail](https://mdr.nims.go.jp/filesets/0b9ee82a-585c-44f9-b464-434c8a3dba64.md))

## Id

f126e446-0373-44c0-82f3-d2da4cd79ed0

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-11-06T07:51:46.349166Z

## Updated at

2023-11-07T06:36:26.020122Z

## Published at

2023-11-07T04:30:14.888017Z

## Doi

https://doi.org/10.48505/nims.4255

## First published url

https://doi.org/10.1002/sia.740200112

## Date published

2004-09-15

## Recorded date published

1993-1

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Calculations of Electron Inelastic Mean Free Paths IV. Evaluation of calculated
    IMFPs and of the predictive IMFP formula TPP-2 for electron energies between 50
    and 2000 eV
  title_type: original
  lang: en

## Description

- description: 'We have made additional evaluations of the electron inelastic mean
    free paths ([MFPs) and of the predictive IMFP formula TPP-2 presented in papers
    II and III of this series. Comparisons have been made with other formulae for
    the IMFPs and electron attenuation lengths (ALs). We find substantial differences
    between our IMFP results for 27 elements and 15 inorganic compounds and the AL
    formulae of Seah and Dench; these differences include different dependences on
    electron energy and on material parameters. We present IMFP calculations for Al2O3
    and GaAs from TPP-2 in which each parameter of the formula is varied in some physically
    reasonable range about the true value for each compound; these results show the
    sensitivity of the computed IMFPs to the choices of parameter values. Finally,
    we give a summary of sources of uncertainty in the IMFP algorithm, in the experimental
    optical data from which IMFPs are calculated, and of the TPP-2 formula. We conclude
    that TPP-2 is robust and useful for predicting IMFPs for electron energies and
    material parameter values in ranges for which the formula was developed and tested. '
  description_type: abstract
  lang: en

## Creator

- name: Tanuma, S.
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941
  organization: NIMS
  department: 技術開発・共用部門　運営室
- name: Powell, C. J.
  role: author
  organization: NIST
- name: Penn, D. R.
  role: author
  organization: NIST

## Contact agent

- name: Tanuma, Shigeo
  email: tanuma-sh@tbd.t-com.ne.jp
  orcid: https://orcid.org/0000-0003-2628-9941
  organization: NIMS
  department: 装置開発・共用部門
  ror: https://ror.org/

## Publisher

organization: 'Wiley '

## Managing organization



## Keyword

- subject: IMFP
  schema: not_defined
- subject: predictive IMFP formula TPP-2
  schema: not_defined
- subject: Evaluations of TPP-2 formula
  schema: not_defined

## Rights

- description: 'This is the peer reviewed version of the following article: Calculations
    of Electron Inelastic Mean Free Paths IV. Evaluation of calculated IMFPs and of
    the predictive IMFP formula TPP-2 for electron energies between 50 and 2000 eV,
    which has been published in final form at  https://doi.org/10.1002/sia.740200112.
    This article may be used for non-commercial purposes in accordance with Wiley
    Terms and Conditions for Use of Self-Archived Versions. This article may not be
    enhanced, enriched or otherwise transformed into a derivative work, without express
    permission from Wiley or by statutory rights under applicable legislation. Copyright
    notices must not be removed, obscured or modified. The article must be linked
    to Wiley’s version of record on Wiley Online Library and any embedding, framing
    or otherwise making available the article or pages thereof by third parties from
    platforms, services and websites other than Wiley Online Library must be prohibited.'
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Surface and Interface Analysis
  issn: '01422421'
  volume: '20'
  issue: '1'
  start_page: 77
  end_page: 89

## Conference



## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 0b9ee82a-585c-44f9-b464-434c8a3dba64
  filename: IMFP IV AMS.pdf
  content_type: application/pdf
  size: 2788408
  md5: cac697428dd801e31426c7d620a533f0

## Thumbnail

fileset_id: 0b9ee82a-585c-44f9-b464-434c8a3dba64
filename: IMFP IV AMS.pdf