# High Quality Factor Single-Crystal Diamond NEMS Cantilevers Fabricated by A Smart-Cut Method

https://mdr.nims.go.jp/datasets/f0045dd4-afd0-47f0-97b5-f2789b323cbc

## Files

- [NDNC2025_abstract_Chen.docx](https://mdr.nims.go.jp/filesets/d407c875-2424-45f0-a768-866cfd344806/download) ([Detail](https://mdr.nims.go.jp/filesets/d407c875-2424-45f0-a768-866cfd344806.md))

## Id

f0045dd4-afd0-47f0-97b5-f2789b323cbc

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-05-17T02:11:15.970012Z

## Updated at

2025-05-21T23:30:08.136583Z

## Published at

2025-05-21T23:23:11.617245Z

## Doi

https://doi.org/10.48505/nims.5490

## First published url



## Date published



## Recorded date published



## Resource type

conference_poster

## Manuscript type

na

## Collection



## Title

- title: High Quality Factor Single-Crystal Diamond NEMS Cantilevers Fabricated by
    A Smart-Cut Method
  title_type: original
  lang: en

## Description

- description: In this work, we investigated the resonance properties of SCD NEMS
    and their energy dissipation mechanisms at nanoscale. First, the SCD MEMS cantilevers
    with different length were fabricated by the smart-cut technique based on our
    previous work [4], as shown in Fig.1 (a). Oxygen etching was developed to fabricate
    nanometer-thick SCD NEMS. Through the high-temperature oxygen annealing (685°C,
    80 hours) and reactive ion etching (RIE) for 10.5 minutes, the thickness of SCD
    MEMS resonators was successfully reduced from micro to nanoscale (sub 100 nm).
    As depicted in Fig.1 (b), the results shows that when the thickness of the SCD
    cantilevers was reduced from approximately 450 nm to 50 nm, the Q-factor decreased
    with the thickness from 105 to 104, achieving SCD NEMS cantilevers with a thickness
    of approximately 50 nm and a high Q-factor (> 50,000). The force sensitivity of
    the NEMS cantilever was 10 times improved to be ~10-17 N/Hz1/2. This work provides
    a new method for the fabrication of high sensitivity SCD NEMS sensors.
  description_type: abstract
  lang: eng

## Creator

- name: Guo Chen
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Wen Zhao
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Keyun Gu
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Yasuo Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Next-generation Semiconductor Group
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group

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## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

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## Data origin

- data_origin_type: other

## Embargo



## Journal



## Conference

name: The 18th International Conference on New Diamond and Nano Carbons
start_date: 2025-05-11
end_date: 2025-05-15
identifier: https://ndnc2025.org/index.html

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## Fileset

- id: d407c875-2424-45f0-a768-866cfd344806
  filename: NDNC2025_abstract_Chen.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 324590
  md5: 594cf4c64f6216bc353e087d11d95dec

## Thumbnail

fileset_id: d407c875-2424-45f0-a768-866cfd344806
filename: NDNC2025_abstract_Chen.docx