@misc{guo-a,
  title = {High Quality Factor Single-Crystal Diamond NEMS Cantilevers Fabricated by A Smart-Cut Method},
  author = {Guo Chen, Wen Zhao, Keyun Gu, Satoshi Koizumi, Yasuo Koide, Meiyong Liao},
  publisher = {},
  year = {},
  keywords = {Diamond, MEMS}
}