# Frequency Stability of Higher Order Modes Diamond MEMS Resonator

https://mdr.nims.go.jp/datasets/efdbe16c-08a5-4d16-ae3c-03a17066b451

## File

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## Id

efdbe16c-08a5-4d16-ae3c-03a17066b451

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-12-02T06:17:18.579696Z

## Updated at

2024-12-04T23:30:52.352897Z

## Published at

2024-12-04T23:30:52.465295Z

## Doi

https://doi.org/10.48505/nims.5088

## First published url



## Date published



## Recorded date published



## Resource type

conference_presentation

## Manuscript type

na

## Collection



## Title

- title: 高次モードダイヤモンドMEMS共振センサーの周波数安定性研究
  title_type: alternative
  lang: ja
- title: Frequency Stability of Higher Order Modes Diamond MEMS Resonator
  title_type: original
  lang: en

## Description

- description: In this work, we propose the use of high-order mode resonance for sensing
    applications, which can maintain the device mass and increase the band width simultaneously.
    We analyze the frequency stability of the high-order mode resonance of diamond
    MEMS cantilevers. It is shown that the higher-order mode resonance improves the
    frequency stability.
  description_type: abstract
  lang: eng

## Creator

- name: ザオ ウェン
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: 顧 克云
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: 陳 果
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: ジャン ジロン
  role: author
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: 小泉 聡
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: 小出 康夫
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials
- name: 廖 梅勇
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group

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## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal



## Conference

name: 第３８回ダイヤモンドシンポジウム
start_date: 2024-11-20
end_date: 2024-11-22
identifier: https://jndf.org/katsudo/symposium/sympo-38th.html

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## Specimen



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## Fileset

- id: 50fa3455-8711-4239-8dc6-010746adc277
  filename: 2-NEW Diamond Forum-Wen Liao R.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 1074291
  md5: 61cefef43b14fa2be1a3d359f15f2e42

## Thumbnail

fileset_id: 50fa3455-8711-4239-8dc6-010746adc277
filename: 2-NEW Diamond Forum-Wen Liao R.docx