@misc{jiangwei2023a,
  title = {Electrical Properties of Boron-Doped Diamond MOSFETs With Ozone as Oxygen Precursor for Al2O3 Deposition},
  author = {Jiangwei Liu, Tokuyuki Teraji, Bo Da, Yasuo Koide},
  publisher = {Institute of Electrical and Electronics Engineers (IEEE)},
  year = {2023-03-16},
  keywords = {Boron-doped diamond, MOS capacitor, MOSFET}
}