# A data-driven surrogate model for X-ray photoelectron spectroscopy based on survey spectrum background features

https://mdr.nims.go.jp/datasets/ed0727c8-9bb4-43c9-89ef-6caa558d53b5

## File

- [1-s2.0-S0368204826000216-main.pdf](https://mdr.nims.go.jp/filesets/90a0f26b-69f8-49cc-b7db-b8d9ac72844a/download) ([Detail](https://mdr.nims.go.jp/filesets/90a0f26b-69f8-49cc-b7db-b8d9ac72844a.md))

## Id

ed0727c8-9bb4-43c9-89ef-6caa558d53b5

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2026-04-16T03:49:15.201180Z

## Updated at

2026-04-16T06:42:06.271913Z

## Published at

2026-04-16T09:27:28.055257Z

## Doi



## First published url

https://doi.org/10.1016/j.elspec.2026.147612

## Date published

2026-03-31

## Recorded date published

2026-5

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: A data-driven surrogate model for X-ray photoelectron spectroscopy based
    on survey spectrum background features
  title_type: original
  lang: en

## Description

- description: 本研究ではX線光電子分光のサーベイスペクトルを活用したサロゲートモデルを提案します．この取り組みは本研究が初の試みです．このモデルは二層膜構造の膜厚に応じたスペクトル形状の変化を定量的に記述します．SESSAシミュレータを活用してサーベイスペクトルを各電子軌道ごとの寄与に分解し，厚さ依存を応答関数で記述することでSESSAのシミュレーションを一般化します．サロゲートモデルを使ったサーベイスペクトルのフィッティングにより，迅速かつ高精度な膜厚推定が可能となりました．
  description_type: abstract
  lang: und

## Creator

- name: Shunichi Yoneda
  role: author
- name: Ryo Murakami
  role: author
  orcid: https://orcid.org/0000-0001-8585-9268
  organization: National Institute for Materials Science
- name: Hiroshi Shinotsuka
  role: author
  orcid: https://orcid.org/0000-0001-5147-1396
  organization: National Institute for Materials Science
- name: Hideki Yoshikawa
  role: author
  orcid: https://orcid.org/0000-0002-7389-8865
  organization: National Institute for Materials Science
- name: Shigeo Tanuma
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941
  organization: National Institute for Materials Science
- name: Hiromi Tanaka
  role: author
- name: Hayaru Shouno
  role: author
- name: Kenji Nagata
  role: author
  orcid: https://orcid.org/0000-0001-9894-4461
  organization: National Institute for Materials Science

## Contact agent



## Publisher

organization: Elsevier BV

## Managing organization



## Keyword

- subject: X-ray photoelectron spectroscopy
  schema: not_defined
- subject: Survey spectrum
  schema: not_defined
- subject: Surrogate model
  schema: not_defined
- subject: Total electron attenuation length
  schema: not_defined
- subject: Thickness estimation
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc-nd/4.0/
  date_licensed: 2026-04-06

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Journal of Electron Spectroscopy and Related Phenomena
  issn: '03682048'
  volume: '286'
  article_number: '147612'

## Conference



## Related item



## Funding

- funder_name: National Institute for Materials Science

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: 90a0f26b-69f8-49cc-b7db-b8d9ac72844a
  filename: 1-s2.0-S0368204826000216-main.pdf
  content_type: application/pdf
  size: 3789542
  md5: 92b120915573c2eeee105d4865f73bb4

## Thumbnail

fileset_id: 90a0f26b-69f8-49cc-b7db-b8d9ac72844a
filename: 1-s2.0-S0368204826000216-main.pdf