@misc{shunichi2026a, title = {A data-driven surrogate model for X-ray photoelectron spectroscopy based on survey spectrum background features}, author = {Shunichi Yoneda, Ryo Murakami, Hiroshi Shinotsuka, Hideki Yoshikawa, Shigeo Tanuma, Hiromi Tanaka, Hayaru Shouno, Kenji Nagata}, publisher = {Elsevier BV}, year = {2026-03-31}, keywords = {X-ray photoelectron spectroscopy, Survey spectrum, Surrogate model, Total electron attenuation length, Thickness estimation} }