# Cutting nanodisks in graphene down to 20 nm in diameter

https://mdr.nims.go.jp/datasets/ece2796b-0066-4560-a8ac-3834aa06f90c

## File

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## Id

ece2796b-0066-4560-a8ac-3834aa06f90c

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-09-02T02:25:04.229292Z

## Updated at

2025-05-15T23:30:30.948187Z

## Published at

2025-05-15T23:20:28.107476Z

## Doi

https://doi.org/10.48505/nims.4720

## First published url

https://doi.org/10.1088/1361-6528/ad40b5

## Date published

2024-07-29

## Recorded date published

2024-7-29

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Cutting nanodisks in graphene down to 20 nm in diameter
  title_type: original
  lang: en

## Description

- description: A direct focused He+ beam direct machining is presented to fabricate
    solid-state nano-disk at the surface of a graphene multilayer micro-flake deposited
    on an Au/Ti/sapphire surface. At irradiation doses larger than 5.0×1017 ions/cm2
    and with a beam size well below 1 nm, graphene disks down to 20 nm in diameter
    have been machined with for nano-disk down to 50 nm in diameter, a central hole
    for preparing the positioning of a rotation axle. The local heat generated by
    this irradiation is inducing a partial graphene amorphization and deformation,
    leading to a complete graphene nano-disk vaporization at doses larger than 5×1018
    ions/cm2. A dry transfer printing technique followed by a graphene surface cleaning
    was used to transfer the nano-disks from its initial surface to a fresh and clean
    surface. Tapping mode atomic force micrograph has been recorded to follow the
    vaporization as a function of the He+ dose to confirm the graphene solid-state
    nano-disk fabrication limit to about 20 nm with this process.
  description_type: abstract
  lang: und

## Creator

- name: Makoto Sakurai
  role: author
  orcid: https://orcid.org/0000-0003-0909-4608
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Ayako Omura Okano
  role: author
- name: Takuya Iwasaki
  role: author
  orcid: https://orcid.org/0000-0002-1103-2433
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26
- name: Christian Joachim
  role: author
  organization: National Institute for Materials Science

## Contact agent



## Publisher

organization: IOP Publishing

## Managing organization



## Keyword

- subject: Focused He Ion beam
  schema: not_defined

## Rights

- description: "© 2024 IOP Publishing Ltd<br>\r\nThis is an author-created, un-copyedited
    version of an article accepted for publication/published\r\nin [insert name of
    journal]. IOP Publishing Ltd is not responsible for any errors or omissions in
    this version of the manuscript or\r\nany version derived from it. The Version
    of Record is available online at https://dx.doi.org/10.1088/1361-6528/ad40b5"
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2024-05-16
end_date: 2025-05-16

## Journal

- title: Nanotechnology
  issn: '13616528'
  volume: '35'
  issue: '31'
  article_number: '315301'

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## Funding

- identifier: 'Grant Number: JPMXP1222BA0047'
  funder_name: Advanced Research Infrastructure for Materials and Nanotechnology (ARIM),
    MEXT
- identifier: Grant N°766864
  funder_name: European FET-Open project MEMO

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## Fileset

- id: e75175f7-1d05-4fdf-9d49-bf191104c34f
  filename: Main 2023-12-15.pdf
  content_type: application/pdf
  size: 1399184
  md5: 6dd4a59bfeff746a0b198377d86c1237

## Thumbnail

fileset_id: e75175f7-1d05-4fdf-9d49-bf191104c34f
filename: Main 2023-12-15.pdf