# Calibration of binding energy and clarification of interfacial band bending for the Al2O3/diamond heterojunction

https://mdr.nims.go.jp/datasets/ecc79f15-2ec8-4f0c-b53c-2e8e62a5dfef

## File

- [manuscript.pdf](https://mdr.nims.go.jp/filesets/048c24d0-567f-4aff-9ef1-e09cfa855342/download) ([Detail](https://mdr.nims.go.jp/filesets/048c24d0-567f-4aff-9ef1-e09cfa855342.md))

## Id

ecc79f15-2ec8-4f0c-b53c-2e8e62a5dfef

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2024-09-04T22:56:09.583922Z

## Updated at

2024-09-13T03:30:32.642436Z

## Published at

2024-09-13T03:30:32.715033Z

## Doi

https://doi.org/10.48505/nims.4748

## First published url

https://doi.org/10.1063/5.0230817

## Date published

2024-09-02

## Recorded date published

2024-9-2

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Calibration of binding energy and clarification of interfacial band bending
    for the Al2O3/diamond heterojunction
  title_type: original
  lang: en

## Description

- description: Due to the presence of an intrinsic C 1s peak in diamond, it is impossible
    to calibrate its binding energies using the adventitious C 1s peak (284.8 eV)
    during X-ray photoelectron spectroscopy measurement. The absence of accurate binding
    energy measurement makes it challenging to determine the interfacial band bending
    for the oxide/diamond heterojunction. To overcome this issue, a net-patterned
    gold (Au) mask is applied to the boron-doped diamond (B-diamond) to suppress the
    charge-up effect and calibrate the binding energy using the standard Au 4f peak
    (83.96 eV). The B-diamond epitaxial layer shows downward band bending towards
    the surface with valence band maximum of 0.85 eV. Upon the formation of Al2O3
    using an ozone precursor through the atomic layer deposition technique, the B-diamond
    continues to exhibit downward band bending towards the Al2O3/B-diamond interface.
    However, the bending energy has reduced, potentially attributed to the modification
    of the oxygen vacancies on the B-diamond surface by the ozone precursor during
    the Al2O3 deposition.
  description_type: abstract
  lang: und

## Creator

- name: J. W. Liu
  role: author
  orcid: https://orcid.org/0000-0003-2580-7401
  organization: National Institute for Materials Science
- name: T. Teraji
  role: author
  orcid: https://orcid.org/0000-0002-7731-0547
  organization: National Institute for Materials Science
- name: B. Da
  role: author
  orcid: https://orcid.org/0000-0002-0785-8662
  organization: National Institute for Materials Science
- name: Y. Koide
  role: author
  orcid: https://orcid.org/0000-0001-8321-9822
  organization: National Institute for Materials Science

## Contact agent



## Publisher

organization: AIP Publishing

## Managing organization



## Keyword

- subject: binding energy calibration
  schema: not_defined
- subject: carbon-related materials
  schema: not_defined
- subject: XPS
  schema: not_defined
- subject: diamond
  schema: not_defined
- subject: Band bending
  schema: not_defined

## Rights

- description: 'This article may be downloaded for personal use only. Any other use
    requires prior permission of the author and AIP Publishing. This article appeared
    in J. W. Liu, T. Teraji, B. Da, Y. Koide; Calibration of binding energy and clarification
    of interfacial band bending for the Al2O3/diamond heterojunction. Appl. Phys.
    Lett. 2 September 2024; 125 (10): 101601 and may be found at https://doi.org/10.1063/5.0230817'
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: APPLIED PHYSICS LETTERS
  issn: '00036951'
  volume: '125'
  issue: '10'
  article_number: '101601'

## Conference



## Related item



## Funding

- identifier: JP23K03966
  funder_name: Japan Society for the Promotion of Science London
- identifier: 20H05661
  funder_name: Japan Society for the Promotion of Science London
- identifier: and JP20H00313
  funder_name: Japan Society for the Promotion of Science London
- identifier: JPMXS0118068379
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- identifier: JPMJCR1773
  funder_name: Core Research for Evolutional Science and Technology
- identifier: JPMJMS2062
  funder_name: Japan Science and Technology Agency

## Instrument



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## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



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## Fileset

- id: '048c24d0-567f-4aff-9ef1-e09cfa855342'
  filename: manuscript.pdf
  content_type: application/pdf
  size: 776559
  md5: 954acc0f9eac194f15d719a4145f060f

## Thumbnail

fileset_id: '048c24d0-567f-4aff-9ef1-e09cfa855342'
filename: manuscript.pdf