# Diamond MEMS: From Classical to Quantum

https://mdr.nims.go.jp/datasets/e6f88cee-c199-430b-9221-b27d967e1883

## File

- [Revised Manuscript no mark.pdf](https://mdr.nims.go.jp/filesets/25509dce-eab2-485a-b1c5-80f1af2a81fe/download) ([Detail](https://mdr.nims.go.jp/filesets/25509dce-eab2-485a-b1c5-80f1af2a81fe.md))

## Id

e6f88cee-c199-430b-9221-b27d967e1883

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-11-10T07:43:52.498962Z

## Updated at

2024-08-28T23:30:31.278426Z

## Published at

2024-08-28T23:30:31.369993Z

## Doi

https://doi.org/10.48505/nims.4422

## First published url

https://doi.org/10.1002/qute.202300189

## Date published

2023-08-29

## Recorded date published

2023-11

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: 'Diamond MEMS: From Classical to Quantum'
  title_type: original
  lang: en

## Description

- description: " In this paper, the development of diamond‐based MEMS/NEMS from the
    viewpoints of classic devices to quantum systems are reviewed. The fabrication
    process and the classic applications of diamond MEMS/NEMS devices are first described,
    including those from micro‐crystalline, nano‐crystalline/ultranano‐crystalline,
    and single‐crystalline diamonds. Then, the physical properties of nitrogen‐vacancy
    defect center, as well as the application referred to the hybrid system composed
    of MEMS structures and nitrogen‐vacancy centers embedded, strain–spin interaction,
    and diamond‐based optomechanics are introduced. Finally, a conclusion and outlook
    are presented. It is expected that diamond MEMS/NEMS is not only an ideal platform
    for high‐performance and high‐reliability advanced classic MEMS devices but also
    for quantum sensing, information, and exploring the fundamentals of quantum mechanics."
  description_type: abstract
  lang: eng

## Creator

- name: Huanying Sun
  role: author
- name: Zilong Zhang
  role: author
- name: Yulong Liu
  role: author
- name: Guo Chen
  role: author
- name: Tiefu Li
  role: author
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266

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## Publisher

organization: Wiley

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## Keyword

- subject: Diamond, MEMS, sensors, quantum
  schema: not_defined

## Rights

- description: 'This is the peer reviewed version of the following article: Diamond
    MEMS: From Classical to Quantum, which has been published in final form at https://doi.org/10.1002/qute.202300189.
    This article may be used for non-commercial purposes in accordance with Wiley
    Terms and Conditions for Use of Self-Archived Versions. This article may not be
    enhanced, enriched or otherwise transformed into a derivative work, without express
    permission from Wiley or by statutory rights under applicable legislation. Copyright
    notices must not be removed, obscured or modified. The article must be linked
    to Wiley’s version of record on Wiley Online Library and any embedding, framing
    or otherwise making available the article or pages thereof by third parties from
    platforms, services and websites other than Wiley Online Library must be prohibited.'
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2023-08-29
end_date: 2024-08-29

## Journal

- title: Advanced Quantum Technologies
  issn: '25119044'
  volume: '6'
  issue: '11'
  article_number: '2300189'

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## Fileset

- id: 25509dce-eab2-485a-b1c5-80f1af2a81fe
  filename: Revised Manuscript no mark.pdf
  content_type: application/pdf
  size: 35872467
  md5: da6e5879cf5408ba58ab5c68f82dc0e5

## Thumbnail

fileset_id: 25509dce-eab2-485a-b1c5-80f1af2a81fe
filename: Revised Manuscript no mark.pdf