# 研究室を訪ねて

https://mdr.nims.go.jp/datasets/e632a23d-2eb3-4295-bda8-a3c9d4501143

## File

- [PDF版‗オゾンニュース135号「研究所を尋ねて」(女屋)_20250923.pdf](https://mdr.nims.go.jp/filesets/73b5b1c3-6e33-4f81-b7ec-54bffd515707/download) ([Detail](https://mdr.nims.go.jp/filesets/73b5b1c3-6e33-4f81-b7ec-54bffd515707.md))

## Id

e632a23d-2eb3-4295-bda8-a3c9d4501143

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2026-07-30T02:33:42.082556Z

## Updated at

2026-07-31T00:22:02.724316Z

## Published at

2026-07-31T01:29:34.346187Z

## Doi

https://doi.org/10.48505/nims.6432

## First published url

https://ndlsearch.ndl.go.jp/books/R100000002-I000000080606-i33840431#bib

## Date published



## Recorded date published

2025年10月

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: 研究室を訪ねて
  title_type: original
  lang: ja

## Description

- description: "超薄膜エレクトロニクスグループにおける研究の取り組みについて紹介する。\r\n特に、次世代半導体技術に必要不可欠な原子層堆積法を用いた新規機能性薄膜材料の探索について述べる。"
  description_type: abstract
  lang: jpn

## Creator

- name: 女屋 崇
  role: author
  orcid: https://orcid.org/0000-0002-2710-8623
  organization: 物質・材料研究機構
  department: ナノアーキテクトニクス材料研究センター/半導体材料分野/超薄膜エレクトロニクスグループ

## Contact agent



## Publisher

organization: 日本オゾン協会

## Managing organization



## Keyword

- subject: 原子層堆積法
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Ozonews in Japan
  issn: '09178260'
  issue: '135'
  start_page: 14
  end_page: 14

## Conference



## Related item



## Funding



## Instrument



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## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



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## Custom property



## Fileset

- id: 73b5b1c3-6e33-4f81-b7ec-54bffd515707
  filename: PDF版‗オゾンニュース135号「研究所を尋ねて」(女屋)_20250923.pdf
  content_type: application/pdf
  size: 3334173
  md5: 837a7f681e07d2eb220ccc259be51285

## Thumbnail

fileset_id: 73b5b1c3-6e33-4f81-b7ec-54bffd515707
filename: PDF版‗オゾンニュース135号「研究所を尋ねて」(女屋)_20250923.pdf