@misc{yuichi2023a,
  title = {Effect of temperature and HCl partial pressure on the selective area gas etching of (001) β-Ga2O3},
  author = {Yuichi Oshima, Takayoshi Oshima},
  publisher = {IOP Publishing},
  year = {2023-08-01},
  keywords = {β-Ga2O3, etching}
}