# Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam

https://mdr.nims.go.jp/datasets/e237da97-d19d-4495-8653-428045dc6c1a

## File

- [表面科学_13_1992_595.pdf](https://mdr.nims.go.jp/filesets/6527b436-d2c1-4866-a816-930821860936/download) ([Detail](https://mdr.nims.go.jp/filesets/6527b436-d2c1-4866-a816-930821860936.md))

## Id

e237da97-d19d-4495-8653-428045dc6c1a

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2021-10-13T13:29:41.512172Z

## Updated at

2022-10-02T17:04:45.400946Z

## Published at

2021-11-16T10:30:53.780488Z

## Doi



## First published url

https://doi.org/10.1380/jsssj.13.10_595

## Date published

2011-06-10

## Recorded date published

1992

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron
    Spectroscopy by Using Argon Ion Spot Beam
  title_type: original
  lang: en

## Description

- description: It is very difficult to obtained the Auger depth profile of InP multilayer
    structures with argon ion sputtering because the very large surface roughness
    is caused ; therefore the analyses of InP multilayers have been carried out practically
    with the angle-lap profiling method. In order to establish an Auger depth profiling
    analysis method for a InP/GaInAsP multilayer structure specimen with the conventional
    depth profiling analysis method, we have investigated the dependence of the depth
    resolution on ion accelerating voltage and ion current density. The depth resolution
    improved according to the increasing the argon ion accelelating voltage in the
    range of 1'-3 keV. We have obtained the excellent Auger depth profile of the InP/GaInAsP
    multilayer structure by using the argon spot beam of high ion density.
  description_type: abstract
  lang: en

## Creator

- name: OGIWARA, Toshiya
  role: author
  orcid: https://orcid.org/0000-0002-7376-6571
- name: HARADA, Tomoko
  role: author
- name: TANUMA, Shigeo
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941

## Contact agent



## Publisher

organization: Surface Science Society of Japan

## Managing organization



## Keyword

- subject: Auger Depth Profiling Analysis
  schema: not_defined
- subject: InP/GaInAsP Multilayer Specimen
  schema: not_defined
- subject: Argon Ion Spot Beam
  schema: not_defined

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## Structure for specimen



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## Fileset

- id: 6527b436-d2c1-4866-a816-930821860936
  filename: 表面科学_13_1992_595.pdf
  content_type: application/pdf
  size: 6713325
  md5: 6d9e24cd360c0f8065f23778e99653e6

## Thumbnail

fileset_id: 6527b436-d2c1-4866-a816-930821860936
filename: 表面科学_13_1992_595.pdf