@misc{ogiwara2011a,
  title = {Depth Profiling Analysis of InP/GaInAsP Multilayer Structure with Auger Electron Spectroscopy by Using Argon Ion Spot Beam},
  author = {OGIWARA, Toshiya, HARADA, Tomoko, TANUMA, Shigeo},
  publisher = {Surface Science Society of Japan},
  year = {2011-06-10},
  keywords = {Auger Depth Profiling Analysis, InP/GaInAsP Multilayer Specimen, Argon Ion Spot Beam}
}