@misc{tanuma2016a,
  title = {High-Sensitivity and High-Depth Resolution Auger Depth Profiling Using an Inclined Holder based on Geometric Characteristics of Auger Electron Spectroscopy Apparatus Equipped with Concentric Hemispherical Analyzer},
  author = {Tanuma, Shigeo, Ogiwara, Toshiya, Kim, Kyung Joong, Nagatomi, Takaharu},
  publisher = {Surface Analysis Society of Japan},
  year = {2016-04-03},
  keywords = {Auger Depth Profiling Analysis, Si/Ge multiple delta-doped layers, GaAs/AlAs Superlattice, Inclined Holder}
}