# Atomic Layer-Deposited Interlayers for Robust Metal–Polymer Interfaces

https://mdr.nims.go.jp/datasets/e18cc7e8-ca7e-4623-a0ac-85db960bddc0

## File

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## Id

e18cc7e8-ca7e-4623-a0ac-85db960bddc0

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-08-19T12:20:14.024734Z

## Updated at

2025-08-22T00:46:25.277118Z

## Published at

2026-07-07T23:24:36.592158Z

## Doi

https://doi.org/10.48505/nims.5657

## First published url

https://doi.org/10.1021/acsami.5c05156

## Date published

2025-07-16

## Recorded date published

2025-7-16

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Atomic Layer-Deposited Interlayers for Robust Metal–Polymer Interfaces
  title_type: original
  lang: en

## Description

- description: The development of materials for flexible electronics and space applications
    critically depends on the mechanical integrity of metal thin films deposited on
    polymer substrates. However, film cracking and interfacial delamination at the
    metal–polymer interface limit the performance significantly. In this work, we
    demonstrate enhanced adhesion and electromechanical properties of magnetron-sputtered
    aluminum films on polyimide substrates through the introduction of an amorphous
    AlOxHy interlayer deposited via atomic layer deposition (ALD). Employing in situ
    X-ray diffraction and electrical resistance measurements during uniaxial and equi-biaxial
    tensile testing, we reveal that our integrated ALD–PVD approach yields an up-to-3-fold
    increase in both the crack onset and electronic failure strains and doubles the
    adhesion energy of the system. The AlOxHy interlayer alters interface-driven deformation
    mechanisms from absorbing to blocking dislocations at the interface. The strengthened
    metal–polymer interface, in turn, improves electromechanical stability at expanded
    strain ranges, resulting in shorter and more angled cracks in the metal film.
    This enhanced strain tolerance opens up alternative pathways for the development
    of flexible thin film devices that can conform to complex curved surfaces and
    withstand deformation while maintaining their functional properties.
  description_type: abstract
  lang: und

## Creator

- name: Johanna Byloff
  role: author
  orcid: https://orcid.org/0000-0001-6026-6845
- name: Claus Othmar Wolfgang Trost
  role: author
  orcid: https://orcid.org/0000-0002-7570-688X
- name: Vivek Devulapalli
  role: author
- name: Shuhel Altaf Husain
  role: author
- name: Damien Faurie
  role: author
  orcid: https://orcid.org/0000-0001-7259-3958
- name: Pierre-Olivier Renault
  role: author
- name: Thomas Edward James Edwards
  role: author
  orcid: https://orcid.org/0000-0002-3089-0062
- name: Megan J. Cordill
  role: author
  orcid: https://orcid.org/0000-0003-1142-8312
- name: Daniele Casari
  role: author
  orcid: https://orcid.org/0000-0003-2113-5070
- name: Barbara Putz
  role: author

## Contact agent



## Publisher

organization: American Chemical Society (ACS)

## Managing organization



## Keyword

- subject: thin films
  schema: not_defined
- subject: electromechanical properties
  schema: not_defined
- subject: atomic layer deposition
  schema: not_defined
- subject: flexible substrates
  schema: not_defined
- subject: tensile testing
  schema: not_defined
- subject: adhesion
  schema: not_defined

## Rights

- description: This document is the Accepted Manuscript version of a Published Work
    that appeared in final form in ACS Applied Materials & Interfaces, copyright ©  2025
    American Chemical Society after peer review and technical editing by the publisher.
    To access the final edited and published work see https://doi.org/10.1021/acsami.5c05156.
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2025-07-08
end_date: 2026-07-08

## Journal

- title: ACS Applied Materials & Interfaces
  issn: '19448244'
  volume: '17'
  issue: '28'
  start_page: 41224
  end_page: 41236

## Conference



## Related item



## Funding

- identifier: 24K23036
  funder_name: Japan Society for the Promotion of Science

## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

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## Thumbnail

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filename: ALD_Interlayers_for_robust_metal-polymer_interfaces_supporting-info.pdf