# Characterization of Young’s Modulus Anisotropy of Single-Crystal Diamond

https://mdr.nims.go.jp/datasets/e04c9e49-79a0-4ee6-baa3-bfb2f9d393c5

## File

- [abstract Zhang_Liao.docx](https://mdr.nims.go.jp/filesets/e98e8a72-0fc7-4aed-a747-1902566c2fcd/download) ([Detail](https://mdr.nims.go.jp/filesets/e98e8a72-0fc7-4aed-a747-1902566c2fcd.md))

## Id

e04c9e49-79a0-4ee6-baa3-bfb2f9d393c5

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## Visibility

open_to_public

## State

published

## Created at

2025-10-15T12:15:03.829062Z

## Updated at

2025-11-06T03:30:27.865984Z

## Published at

2025-11-06T03:24:57.336766Z

## Doi

https://doi.org/10.48505/nims.5857

## First published url



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## Resource type

conference_presentation

## Manuscript type

na

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## Title

- title: Characterization of Young’s Modulus Anisotropy of Single-Crystal Diamond
  title_type: original
  lang: en

## Description

- description: "Diamond serves as an attractive material for microelectromechanical
    systems (MEMS) owing to its superior properties, including high mechanical strength,
    low coefficient of thermal expansion and the highest thermal conductivity among
    semiconductors. To achieve reliable mechanical design and performance prediction
    of diamond-based MEMS devices, accurate knowledge of its elastic properties, especially
    Young’s modulus, is crucial. However, the reported value for the Young’s modulus
    of practical single-crystal diamond (SCD) varies greatly due to its elastic anisotropy,
    which has yet to be extensively investigated. \r\n[Experiment] To understand the
    Young’s modulus anisotropy of SCD, we designed a “wagon-wheel” structure comprising
    circle-array SCD microcantilevers on a (001) diamond substrate, where the cantilever
    orientations span from 0° to 360° in 15° increments. The out-of-plane resonance
    frequencies of the SCD cantilevers, actuated by a piezoelectric ceramic, were
    measured in a vacuum (10−5 Torr) with a laser Doppler vibrometer. By applying
    the Euler–Bernoulli beam equation as shown below, the Young’s modulus of cantilevers
    oriented in different directions can be derived.\r\n[Result] Figure 1(a) illustrates
    the SCD cantilevers with a ‘wagon-wheel’ structure on the (001) crystal plane.
    All cantilevers have an identical length of 100~120 μm, a thickness of approximately
    1~2 μm and a width of 12 μm. A representative set of 1st order resonance spectra
    from cantilevers are presented in Fig. 1(b)-(d). By calculating the Young’s modulus
    along various directions in the (001) plane of diamond, we found that SCD cantilevers
    oriented along the <100> and <110> directions exhibit the minimum and maximum
    modulus values, respectively, which agrees well with the theoretical rotational
    dependence of Young’s modulus."
  description_type: abstract
  lang: eng

## Creator

- name: Zhaozong Zhang
  role: author
  orcid: https://orcid.org/0009-0003-8745-4469
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Wen Zhao
  role: author
  orcid: https://orcid.org/0000-0001-8159-8195
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Guo Chen
  role: author
  orcid: https://orcid.org/0009-0004-9263-5616
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  department: Research Center for Electronic and Optical Materials/Functional Materials
    Field/Ultra-wide Bandgap Semiconductors Group

## Contact agent



## Publisher

organization: 公益社団法人 応用物理学会

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## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: http://rightsstatements.org/vocab/InC/1.0/

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## Data origin

- data_origin_type: other

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## Journal



## Conference

name: 2025年第86回応用物理学会秋季学術講演会
start_date: 2025-09-07
end_date: 2025-09-10
identifier: https://meeting.jsap.or.jp/

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## Fileset

- id: e98e8a72-0fc7-4aed-a747-1902566c2fcd
  filename: abstract Zhang_Liao.docx
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  size: 822151
  md5: a60be29f4e0bdeb55b3ba494acd6b123

## Thumbnail

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filename: abstract Zhang_Liao.docx