@misc{zhaozong-a, title = {Characterization of Young’s Modulus Anisotropy of Single-Crystal Diamond}, author = {Zhaozong Zhang, Wen Zhao, Guo Chen, Satoshi Koizumi, Meiyong Liao}, publisher = {公益社団法人 応用物理学会}, year = {}, keywords = {Diamond, MEMS} }