@misc{yuichi2025a,
  title = {HCl-gas etching of (001) β-Ga2O3 under oxygen supply},
  author = {Yuichi Oshima, Takayoshi Oshima},
  publisher = {Taylor & Francis},
  year = {2025-12-31},
  keywords = {Ga2O3, etching, plasma-free}
}