@misc{yuichi2021a,
  title = {Visualization of threading dislocations in an α-Ga2O3 epilayer by HCl gas etching},
  author = {Yuichi Oshima, Shingo Yagyu, Takashi Shinohe},
  publisher = {Elsevier BV},
  year = {2021-10-19},
  keywords = {α-Ga2O3, dislocation, etching}
}