# H-Radical Reactive Infrared Laser Deposition of LiH: A Method for Growing High-Quality Metal Hydride Epitaxial Films

https://mdr.nims.go.jp/datasets/db5b4f0b-a8d0-473d-b34d-11191ec8722b

## File

- [Manuscript_File_KM.pdf](https://mdr.nims.go.jp/filesets/c60cb4eb-5864-4a5f-a237-b73ea410633d/download) ([Detail](https://mdr.nims.go.jp/filesets/c60cb4eb-5864-4a5f-a237-b73ea410633d.md))

## Id

db5b4f0b-a8d0-473d-b34d-11191ec8722b

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-06-09T05:54:55.701493Z

## Updated at

2025-07-14T07:30:24.259898Z

## Published at

2025-07-14T07:17:18.890584Z

## Doi

https://doi.org/10.48505/nims.5587

## First published url

https://doi.org/10.1021/acs.inorgchem.4c05449

## Date published

2025-04-28

## Recorded date published

2025-4-28

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: 'H-Radical Reactive Infrared Laser Deposition of LiH: A Method for Growing
    High-Quality Metal Hydride Epitaxial Films'
  title_type: original
  lang: en

## Description

- description: We present a new film growth method designed specifically for growing
    metal hydride thin films that we name “H-radical reactive infrared laser deposition”.
    This approach leverages hydrogen radicals (H·) to achieve rapid and complete metal
    hydrogenation, leading to high-purity hydride phases. We demonstrate the effectiveness
    of this method through the growth of LiH epitaxial thin films, where the H· supply
    eliminates Li precipitates and enhances crystallinity. Additionally, the use of
    an infrared laser minimizes film–substrate reactions, reducing the level of impurity
    formation. To explore the material tunability of this method, we successfully
    controlled film orientation and achieved Mg doping in LiH. Our findings establish
    H-radical reactive infrared laser deposition as a promising method for fabricating
    high-quality metal hydride thin films with tailored properties.
  description_type: abstract
  lang: und

## Creator

- name: Kota Munefusa
  role: author
- name: Erika Fukushi
  role: author
  orcid: https://orcid.org/0009-0003-7416-2360
- name: Takayuki Harada
  role: author
  orcid: https://orcid.org/0000-0002-8657-2258
- name: Hiroyuki Oguchi
  role: author
  orcid: https://orcid.org/0000-0001-8062-4363

## Contact agent



## Publisher

organization: American Chemical Society (ACS)

## Managing organization



## Keyword

- subject: Hydride
  schema: not_defined
- subject: Thin films
  schema: not_defined

## Rights

- description: This document is the unedited Author’s version of a Submitted Work
    that was subsequently accepted for publication in Inorganic Chemistry, copyright
    © 2025 American Chemical Society after peer review. To access the final edited
    and published work see https://doi.org/10.1021/acs.inorgchem.4c05449.
  identifier: http://rightsstatements.org/vocab/InC/1.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Inorganic Chemistry
  issn: '00201669'
  volume: '64'
  issue: '16'
  start_page: 7945
  end_page: 7950

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## Funding

- funder_name: Fujikura Foundation
- identifier: 18H01727
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- identifier: 19K22225
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- identifier: 24K21249
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- identifier: 7K19 K22225
  funder_name: Ministry of Education, Culture, Sports, Science and Technology
- identifier: 2022-87
  funder_name: National Institute for Materials Science
- identifier: 2023-024
  funder_name: National Institute for Materials Science
- identifier: 0361115-A
  funder_name: Iketani Science and Technology Foundation

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## Fileset

- id: c60cb4eb-5864-4a5f-a237-b73ea410633d
  filename: Manuscript_File_KM.pdf
  content_type: application/pdf
  size: 1363777
  md5: 235e55441bea8da73636a0967bbc40ba

## Thumbnail

fileset_id: c60cb4eb-5864-4a5f-a237-b73ea410633d
filename: Manuscript_File_KM.pdf