# Effect of defects on Q factors of single-crystal diamond MEMS resonators

https://mdr.nims.go.jp/datasets/d86ed157-153f-4ff4-b6cc-458c725af04c

## File

- [Effect of defects on Q factors of single crystal diamond MEMS resonators.pdf](https://mdr.nims.go.jp/filesets/6cfed0f1-17b9-4d41-8ea4-62655fe594bc/download) ([Detail](https://mdr.nims.go.jp/filesets/6cfed0f1-17b9-4d41-8ea4-62655fe594bc.md))

## Id

d86ed157-153f-4ff4-b6cc-458c725af04c

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-11-10T07:51:54.702440Z

## Updated at

2024-03-05T07:30:18.889286Z

## Published at

2024-03-05T07:30:18.999734Z

## Doi



## First published url

https://doi.org/10.1080/26941112.2023.2221280

## Date published

2023-12-31

## Recorded date published

2023-12-31

## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: Effect of defects on Q factors of single-crystal diamond MEMS resonators
  title_type: original
  lang: en

## Description

- description: A resonator with a high Q factor is generally pursued in the single-crystal
    diamond (SCD) microelectromechanical system (MEMS) for high-performance sensors.
    In this report, we investigate the oxygen etching effect of SCD on the Q factors
    of the SCD resonators by using the Raman spectroscopy spatial mapping. We aim
    to establish the etch pit effect on the Q factors of the SCD MEMS resonators.
    The 2D Raman imaging technique discloses the dislocations and the local stress
    in the SCD MEMS resonators in microscale. It is observed that the full width half
    maximum (FWHM) of the Raman spectra of the SCD resonators has marked relationship
    with the Q factors of the SCD resonators. The etch pits resulted from the dislocations
    have weak influence on the Q factors of the SCD resonators.
  description_type: abstract
  lang: eng

## Creator

- name: Zilong Zhang
  role: author
  orcid: https://orcid.org/0000-0002-9759-9253
- name: Guo Chen
  role: author
- name: Keyun Gu
  role: author
- name: Satoshi Koizumi
  role: author
  orcid: https://orcid.org/0000-0003-4961-5658
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266

## Contact agent



## Publisher

organization: Informa UK Limited

## Managing organization



## Keyword

- subject: Diamond, MEMS,  Q factor
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Functional diamond
  volume: '3'
  issue: '1'
  article_number: '2221280'

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## Specimen



## Chemical composition



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## Fileset

- id: 6cfed0f1-17b9-4d41-8ea4-62655fe594bc
  filename: Effect of defects on Q factors of single crystal diamond MEMS resonators.pdf
  content_type: application/pdf
  size: 2420259
  md5: d425e01b91ae5471949d40ae77df754b

## Thumbnail

fileset_id: 6cfed0f1-17b9-4d41-8ea4-62655fe594bc
filename: Effect of defects on Q factors of single crystal diamond MEMS resonators.pdf