# Structural and Electric Characterization of Sputtered Pt/WSe2 Contacts toward High-Performance 2D p-FETs https://mdr.nims.go.jp/datasets/d76d31a6-d038-448e-b0fc-b15a929f6d20 ## File - [2025-ACSomega-Nakajima-structural-and-electric-characterization-of-sputtered-pt-wse2-contacts-toward-high-performance-2d-p-fets.pdf](https://mdr.nims.go.jp/filesets/d672e834-a4d4-4c70-8091-e9979a3fc064/download) ([Detail](https://mdr.nims.go.jp/filesets/d672e834-a4d4-4c70-8091-e9979a3fc064.md)) ## Id d76d31a6-d038-448e-b0fc-b15a929f6d20 ## Local identifier ## Visibility open_to_public ## State published ## Created at 2025-12-09T00:32:20.064246Z ## Updated at 2025-12-09T07:31:02.888823Z ## Published at 2025-12-09T07:26:08.341454Z ## Doi ## First published url https://doi.org/10.1021/acsomega.5c05764 ## Date published 2025-09-23 ## Recorded date published 2025-9-23 ## Resource type journal_article ## Manuscript type vor ## Collection ## Title - title: Structural and Electric Characterization of Sputtered Pt/WSe2 Contacts toward High-Performance 2D p-FETs title_type: original lang: en ## Description - description: For high-performance p-type field-effect transistors (FETs) based on two-dimensional (2D) materials, the use of Pt as the contact metal, with its high work function, is advantageous for effective hole injection into the 2D channel. However, the high-energy sputtering process required to deposit Pt, due to its high melting point, often induces significant damage to the 2D materials. Recently, the achievement of nearly ideal van der Waals contacts in Sb2Te3/MoS2 via sputtering has motivated us to investigate WSe2 p-FETs with sputtered Pt electrodes. Notably, reasonable p-FET performance was observed even in monolayer WSe2. However, various characterizations revealed that the crystal structure of WSe2 was no longer preserved, suggesting the formation of a quasi-edge contact between Pt-sputtered WSe2 and the WSe2 channel. Moreover, from the perspective of sputtering applicability, the relationship between deposition methods, deposited materials, and the resulting extent of damage was systematically examined. description_type: abstract lang: und ## Creator - name: Ryuichi Nakajima role: author - name: Tomonori Nishimura role: author orcid: https://orcid.org/0000-0002-8000-5164 - name: Kaito Kanahashi role: author orcid: https://orcid.org/0000-0003-2571-3384 - name: Shogo Hatayama role: author orcid: https://orcid.org/0000-0002-2914-1072 - name: Wen Hsin Chang role: author orcid: https://orcid.org/0000-0002-8501-6276 - name: Yuta Saito role: author orcid: https://orcid.org/0000-0002-9576-1560 - name: Toshifumi Irisawa role: author - name: Keiji Ueno role: author - name: Yasumitsu Miyata role: author orcid: https://orcid.org/0000-0002-9733-5119 - name: Takashi Taniguchi role: author orcid: https://orcid.org/0000-0002-1467-3105 - name: Kenji Watanabe role: author orcid: https://orcid.org/0000-0003-3701-8119 - name: Kosuke Nagashio role: author orcid: https://orcid.org/0000-0003-1181-8644 ## Contact agent ## Publisher organization: American Chemical Society (ACS) ## Managing organization ## Keyword - subject: WSe2 Contact FET schema: not_defined ## Rights - identifier: https://creativecommons.org/licenses/by-nc-nd/4.0/ ## Other identifier(s) ## Data origin - data_origin_type: other ## Embargo ## Journal - title: ACS Omega issn: '24701343' volume: '10' issue: '37' start_page: 42973 end_page: 42979 ## Conference ## Related item ## Funding - identifier: JPMJMI22708192 funder_name: JST-Mirai Program - identifier: JPMJCR23A4 funder_name: Core Research for Evolutional Science and Technology - identifier: JPMJCR24A3 funder_name: Core Research for Evolutional Science and Technology - identifier: JPMJCR24A5 funder_name: Core Research for Evolutional Science and Technology - identifier: JP21H05232 funder_name: Japan Society for the Promotion of Science - identifier: JP22H05445 funder_name: Japan Society for the Promotion of Science - identifier: JP22K04212 funder_name: Japan Society for the Promotion of Science - identifier: JP23K02052 funder_name: Japan Society for the Promotion of Science - identifier: JP23K23243 funder_name: Japan Society for the Promotion of Science - identifier: JP23K26745 funder_name: Japan Society for the Promotion of Science - identifier: JP24K08195 funder_name: Japan Society for the Promotion of Science - identifier: JPMJFR213X funder_name: Fusion Oriented REsearch for disruptive Science and Technology - identifier: '05901' funder_name: National Institute of Information and Communications Technology - funder_name: World Premier International Research Center Initiative, Ministry of Education, Culture, Sports, Science and Technology - identifier: JP21H05233 funder_name: Japan Society for the Promotion of Science - identifier: JP21H05236 funder_name: Japan Society for the Promotion of Science - identifier: JP21H05237 funder_name: Japan Society for the Promotion of Science - identifier: JP21K04826 funder_name: Japan Society for the Promotion of Science - identifier: JP22H04957 funder_name: Japan Society for the Promotion of Science ## Instrument ## Instrument operator ## Instrument managing organization ## Measurement method ## Specimen ## Chemical composition ## Structure for specimen ## Structural feature for specimen ## Specific property for specimen ## Process for specimen treatment ## Computational method ## Energy level/transition state ## Software ## Custom property ## Fileset - id: d672e834-a4d4-4c70-8091-e9979a3fc064 filename: 2025-ACSomega-Nakajima-structural-and-electric-characterization-of-sputtered-pt-wse2-contacts-toward-high-performance-2d-p-fets.pdf content_type: application/pdf size: 2708553 md5: 68f161f7751c33dcfc15e592ffb48bd7 ## Thumbnail fileset_id: d672e834-a4d4-4c70-8091-e9979a3fc064 filename: 2025-ACSomega-Nakajima-structural-and-electric-characterization-of-sputtered-pt-wse2-contacts-toward-high-performance-2d-p-fets.pdf