# Calculations of electron inelastic mean free paths. XII. Data for 42  inorganic compounds over the 50 eV to 200 keV range with the full  Penn algorithm

https://mdr.nims.go.jp/datasets/d742ebfe-3a28-4659-8ea6-4afa036fb7a6

## File

- [IMFP_compounds_2018_SIA_.pdf](https://mdr.nims.go.jp/filesets/8aab4ea5-e6ee-4d75-b923-8b9245821427/download) ([Detail](https://mdr.nims.go.jp/filesets/8aab4ea5-e6ee-4d75-b923-8b9245821427.md))

## Id

d742ebfe-3a28-4659-8ea6-4afa036fb7a6

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2021-08-05T16:23:58.524131Z

## Updated at

2024-01-05T13:13:36.633678Z

## Published at

2021-08-12T16:20:04.284524Z

## Doi

https://doi.org/10.48505/nims.1438

## First published url

https://doi.org/10.1002/sia.6598

## Date published

2018-12-27

## Recorded date published

2019-4

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Calculations of electron inelastic mean free paths. XII. Data for 42  inorganic
    compounds over the 50 eV to 200 keV range with the full  Penn algorithm
  title_type: original
  lang: en

## Description

- description: We have calculated inelastic mean free paths (IMFPs) for 42 inorganic
    compounds  (AgBr, AgCl, AgI, Al2O3, AlAs, AlN, AlSb, cubic BN, hexagonal BN, CdS,
    CdSe, CdTe, GaAs, GaN, GaP, GaSb, GaSe, InAs, InP, InSb, KBr, KCl, MgF2, MgO,
    NaCl, NbC0.712, NbC0.844, NbC0.93, PbS, PbSe, PbTe, SiC, SiO2, SnTe, TiC0.7, TiC0.95,
    VC0.76, VC0.86, Y3Al5O12, ZnS, ZnSe, and ZnTe) for electron energies from 50 eV
    to 200 keV. These calculations were made with energy-loss functions (ELFs) obtained
    from measured optical constants for 15 compounds while calculated ELFs were utilized
    for the other 27 compounds. Checks based on ELF sum rules showed that the calculated
    ELFs were superior to the measured ELFs that we had used previously. Our calculated
    IMFPs could be fitted to a modified form of the relativistic Bethe equation for
    inelastic scattering of electrons in matter for energies from 50 eV to 200 keV.
    The average root-mean-square (RMS) deviation in these fits was 0.60 %. The IMFPs
    were also compared with a relativistic version of our predictive Tanuma-Powell-Penn
    (TPP-2M) equation. The average RMS deviation in these comparisons was 10.7 % for
    energies between 50 eV and 200 keV. This average RMS deviation is almost the same
    as that found in a similar comparison for a group of 41 elemental solids (11.9
    %) although relatively large deviations were found for cubic BN (65.6 %) and hexagonal
    BN (34.3%). If these two compounds are excluded in the comparisons, the average
    RMS deviation becomes 8.7 %. We found generally satisfactory agreement between
    our calculated IMFPs and values from other calculations and from experiments.
  description_type: abstract
  lang: en

## Creator

- name: Shinotsuka, Hiroshi
  role: author
  orcid: https://orcid.org/0000-0001-5147-1396
- name: Tanuma, Shigeo
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941
- name: Powell, Cedric J.
  role: author
  orcid: https://orcid.org/0000-0001-8990-2286
- name: Penn,  Dave R.
  role: author

## Contact agent



## Publisher

organization: Wiley

## Managing organization



## Keyword

- subject: IMFP
  schema: not_defined
- subject: Electron Inelastic Mean Free Path
  schema: not_defined
- subject: TPP-2M
  schema: not_defined

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## Fileset

- id: 8aab4ea5-e6ee-4d75-b923-8b9245821427
  filename: IMFP_compounds_2018_SIA_.pdf
  content_type: application/pdf
  size: 10882817
  md5: 4c96067d98241613c5ad93665d960743

## Thumbnail

fileset_id: 8aab4ea5-e6ee-4d75-b923-8b9245821427
filename: IMFP_compounds_2018_SIA_.pdf