# From Mechanics to Electronics: Influence of ALD Interlayers on the Multiaxial Electro‐Mechanical Behavior of Metal–Oxide Bilayers

https://mdr.nims.go.jp/datasets/d59a2dca-d36d-4aff-9fd9-9dad2ee24f3e

## Files

- [Adv Funct Materials - 2025 - Byloff - From Mechanics to Electronics  Influence of ALD Interlayers on the Multiaxial.pdf](https://mdr.nims.go.jp/filesets/7ab6ec76-ef60-40bf-a89d-bb6bf8d416b8/download) ([Detail](https://mdr.nims.go.jp/filesets/7ab6ec76-ef60-40bf-a89d-bb6bf8d416b8.md))

## Id

d59a2dca-d36d-4aff-9fd9-9dad2ee24f3e

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2026-01-20T02:49:58.972765Z

## Updated at

2026-01-20T02:54:44.731204Z

## Published at

2026-01-20T07:21:58.502264Z

## Doi



## First published url

https://doi.org/10.1002/adfm.202526343

## Date published

2025-11-27

## Recorded date published



## Resource type

journal_article

## Manuscript type

vor

## Collection



## Title

- title: 'From Mechanics to Electronics: Influence of ALD Interlayers on the Multiaxial
    Electro‐Mechanical Behavior of Metal–Oxide Bilayers'
  title_type: original
  lang: en

## Description

- description: The applicability of metal-polymer thin films in flexible electronics
    and space applications is fundamentally limited by the trade-off between mechanical
    and functional performance. This study shows how atomic layer deposited (ALD)
    amorphous AlOxHy interlayers (0–25 nm) directly control the electro-mechanical
    functionality of sputter-deposited aluminum films on polyimide substrates. Using
    uni- and equi-biaxial tensile testing with in situ XRD and electrical resistance
    measurements, it is demonstrated that interlayer thickness determines both deformation
    mechanisms and electrical strain limits. Adding an ALD layer between the polymer
    substrate and the metal thin film significantly improves the deformability of
    the system. While a single ALD cycle enhances ductility, surprisingly a 1 nm AlOxHy
    interlayer causes early electrical failure. Optimal performance—improved ductility,
    delayed cracking, and maintained electrical conductivity under large deformation—is
    achieved at 5–10 nm interlayer thickness. Beyond this range, embrittlement causes
    early electrical failure through oxide-initiated cracking. The work establishes
    quantitative design rules linking the nanoscale interface structure to macroscale
    electro-mechanical performance, enabling flexible electronics with tailored mechanical
    properties and enhanced electrical functionality. These findings provide a direct
    pathway from fundamental interface engineering to high-performance flexible devices
    operating under multi-axial deformation.
  description_type: abstract
  lang: und

## Creator

- name: Johanna Byloff
  role: author
  orcid: https://orcid.org/0000-0001-6026-6845
- name: Vivek Devulapalli
  role: author
  orcid: https://orcid.org/0000-0002-1743-3246
- name: Daniele Casari
  role: author
  orcid: https://orcid.org/0000-0003-2113-5070
- name: Thomas E. J. Edwards
  role: author
  orcid: https://orcid.org/0000-0002-3089-0062
- name: Claus O. W. Trost
  role: author
  orcid: https://orcid.org/0000-0002-7570-688X
- name: Megan J. Cordill
  role: author
  orcid: https://orcid.org/0000-0003-1142-8312
- name: Shuhel Altaf Husain
  role: author
  orcid: https://orcid.org/0000-0002-1080-565X
- name: Pierre‐Olivier Renault
  role: author
  orcid: https://orcid.org/0000-0002-0736-2333
- name: Damien Faurie
  role: author
  orcid: https://orcid.org/0000-0001-7259-3958
- name: Barbara Putz
  role: author
  orcid: https://orcid.org/0000-0001-9687-6346

## Contact agent



## Publisher

organization: Wiley

## Managing organization



## Keyword

- subject: atomic layer deposition
  schema: not_defined
- subject: electromechanical properties
  schema: not_defined
- subject: flexible polymer substrates
  schema: not_defined
- subject: tensile testing
  schema: not_defined
- subject: thin films
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by/4.0/

## Other identifier(s)



## Data origin



## Embargo



## Journal

- title: Advanced Functional Materials
  issn: 1616301X
  article_number: e26343

## Conference



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## Funding

- identifier: 231‐11757‐ST
  funder_name: Helmholtz-Zentrum Berlin für Materialien und Energie
- identifier: PZ00P2_20208
  funder_name: Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen
    Forschung
- identifier: SPM‐PN 3022
  funder_name: Amt der Steiermärkischen Landesregierung
- identifier: '840222'
  funder_name: H2020 Marie Skłodowska-Curie Actions
- identifier: 24K23036
  funder_name: Japan Society for the Promotion of Science

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## Fileset

- id: 7ab6ec76-ef60-40bf-a89d-bb6bf8d416b8
  filename: Adv Funct Materials - 2025 - Byloff - From Mechanics to Electronics  Influence
    of ALD Interlayers on the Multiaxial.pdf
  content_type: application/pdf
  size: 8669326
  md5: 71c01dde2db4bd1ffac92469157cc768

## Thumbnail

fileset_id: 7ab6ec76-ef60-40bf-a89d-bb6bf8d416b8
filename: Adv Funct Materials - 2025 - Byloff - From Mechanics to Electronics  Influence
  of ALD Interlayers on the Multiaxial.pdf