# Ultra‐High Sensitivity, Wide‐Range Thermometry Based on High‐Quality Microscale Diamond Resonators

https://mdr.nims.go.jp/datasets/d56c1083-defb-4218-ac86-8d9110ed1fb6

## File

- [30-Manuscript-WEN_2025-Liao 20250114.docx](https://mdr.nims.go.jp/filesets/dbd9f459-6ba3-4fc5-abef-0aa07ea7d66c/download) ([Detail](https://mdr.nims.go.jp/filesets/dbd9f459-6ba3-4fc5-abef-0aa07ea7d66c.md))

## Id

d56c1083-defb-4218-ac86-8d9110ed1fb6

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2025-10-27T06:57:42.290688Z

## Updated at

2025-10-28T03:30:23.951593Z

## Published at

2025-10-28T03:16:24.125808Z

## Doi

https://doi.org/10.48505/nims.5827

## First published url

https://doi.org/10.1002/adma.202502012

## Date published

2025-07-28

## Recorded date published

2025-10

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Ultra‐High Sensitivity, Wide‐Range Thermometry Based on High‐Quality Microscale
    Diamond Resonators
  title_type: original
  lang: en

## Description

- description: Next-generation thermometry requires ultrahigh temperature sensitivity,
    precision, and microscale or nanoscale spatial resolution for bio-calorimetry,
    optoelectronic sensing, quantum science, energy storage, and thermal management
    of electronic devices. Current thermometry approaches based on thermocouple, resistive,
    and optical mechanisms suffer from various problems such as large volume, low
    resolution, high noise level, and narrow temperature range. Microelectromechanical
    system (MEMS) resonators hold great potential as thermometry due to the small
    size, batch fabrication, and facile integration with electrical circuits. However,
    mainstream silicon MEMS thermometry struggles with the trade-off between responsivity,
    temperature resolution, and sensitivity. In this work, we utilize the highest
    crystal quality single-crystal diamond and multi-mode resonance for MEMS cantilever
    thermometry to address these challenges. The resulting diamond MEMS thermometry
    exhibits unparalleled performance, with an ultra-high sensitivity of ≈22 nKHz−1/2,
    a high temperature resolution of 100 µK, and a wide-temperature range from 6.5
    to 380 K. The groundbreaking sensing performance highlights the versatility and
    transformative potential of diamond MEMS resonator as the next-generation platform
    for ultrahigh-sensitivity and high-resolution temperature sensing in microscale
    or nanoscale space.
  description_type: abstract
  lang: und

## Creator

- name: Wen Zhao
  role: author
  orcid: https://orcid.org/0000-0001-8159-8195
- name: Guo Chen
  role: author
  orcid: https://orcid.org/0009-0004-9263-5616
- name: Tokuyuki Teraji
  role: author
  orcid: https://orcid.org/0000-0002-7731-0547
- name: Yasuo Koide
  role: author
- name: Masaya Toda
  role: author
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266

## Contact agent



## Publisher

organization: Wiley

## Managing organization



## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo



## Journal

- title: Advanced Materials
  issn: '09359648'
  volume: '37'
  issue: '42'
  article_number: e02012

## Conference



## Related item



## Funding



## Instrument



## Instrument operator



## Instrument managing organization



## Measurement method



## Specimen



## Chemical composition



## Structure for specimen



## Structural feature for specimen



## Specific property for specimen



## Process for specimen treatment



## Computational method



## Energy level/transition state



## Software



## Custom property



## Fileset

- id: dbd9f459-6ba3-4fc5-abef-0aa07ea7d66c
  filename: 30-Manuscript-WEN_2025-Liao 20250114.docx
  content_type: application/vnd.openxmlformats-officedocument.wordprocessingml.document
  size: 2483390
  md5: bf23b5597ebced79e10ac20f8a3a9481

## Thumbnail

fileset_id: dbd9f459-6ba3-4fc5-abef-0aa07ea7d66c
filename: 30-Manuscript-WEN_2025-Liao 20250114.docx