# Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS

https://mdr.nims.go.jp/datasets/d3d4cc57-3ebb-496b-8bdd-13c77b806223

## File

- [Revised Maunscript (clean version) .pdf](https://mdr.nims.go.jp/filesets/bffc2cab-0b9d-452a-895f-363fd36fe9e5/download) ([Detail](https://mdr.nims.go.jp/filesets/bffc2cab-0b9d-452a-895f-363fd36fe9e5.md))

## Id

d3d4cc57-3ebb-496b-8bdd-13c77b806223

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2023-11-30T02:23:27.172863Z

## Updated at

2025-07-25T23:30:34.849808Z

## Published at

2025-07-25T23:16:47.880205Z

## Doi

https://doi.org/10.48505/nims.4296

## First published url

https://doi.org/10.1016/j.diamond.2023.110240

## Date published

2023-07-26

## Recorded date published

2023-10

## Resource type

journal_article

## Manuscript type

accepted_manuscript

## Collection



## Title

- title: Disclosing the annihilation effect of ion-implantation induced defects in
    single-crystal diamond by resonant MEMS
  title_type: original
  lang: en

## Description

- description: Here, we systematically investigate the effect of ultra-high vacuum
    annealing on the resonance properties of SCD cantilevers. It is observed that
    the Q factors are markedly improved by nearly twice after annealing at 1100 °C
    due to the annihilation of the ion implantation induced damage in the resonators.
    Therefore, reducing the defects in the resonators by high-temperature annealing
    the as-fabricated SCD MEMS cantilevers is one of the strategies to improve the
    Q factors. This work also proves out that MEMS represents a more sensitive tool
    for characterizing the crystalline quality of diamond, compared with the conventional
    structural methods.
  description_type: abstract
  lang: eng

## Creator

- name: Guo Chen
  role: author
- name: Zilong Zhang
  role: author
- name: Yasuo Koide
  role: author
- name: Satoshi Koizumi
  role: author
- name: Zhaohui Huang
  role: author
- name: Meiyong Liao
  role: author
  orcid: https://orcid.org/0000-0003-1361-4266
  organization: National Institute for Materials Science
  ror: https://ror.org/026v1ze26

## Contact agent



## Publisher

organization: Elsevier BV

## Managing organization



## Keyword

- subject: Diamond
  schema: not_defined
- subject: MEMS
  schema: not_defined

## Rights

- identifier: https://creativecommons.org/licenses/by-nc-nd/4.0/

## Other identifier(s)



## Data origin

- data_origin_type: other

## Embargo

start_date: 2023-07-26
end_date: 2025-07-26

## Journal

- title: DIAMOND AND RELATED MATERIALS
  issn: '18790062'
  volume: '38'
  start_page: 110240
  end_page: 110240

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## Fileset

- id: bffc2cab-0b9d-452a-895f-363fd36fe9e5
  filename: Revised Maunscript (clean version) .pdf
  content_type: application/pdf
  size: 2019614
  md5: 1a2c4efaea37902a32ef43bc1d04da19

## Thumbnail

fileset_id: bffc2cab-0b9d-452a-895f-363fd36fe9e5
filename: Revised Maunscript (clean version) .pdf