@misc{guo2023a,
  title = {Disclosing the annihilation effect of ion-implantation induced defects in single-crystal diamond by resonant MEMS},
  author = {Guo Chen, Zilong Zhang, Yasuo Koide, Satoshi Koizumi, Zhaohui Huang, Meiyong Liao},
  publisher = {Elsevier BV},
  year = {2023-07-26},
  keywords = {Diamond, MEMS}
}