# Auger Depth Profiling Analyses of InP/GaInAsP Multilayers

https://mdr.nims.go.jp/datasets/d2f4d5f9-4d9d-4bcc-9ac9-c1f834e6005f

## File

- [表面科学_17_1996_38.pdf](https://mdr.nims.go.jp/filesets/5b55a30b-7aa1-4c74-a101-02a611140408/download) ([Detail](https://mdr.nims.go.jp/filesets/5b55a30b-7aa1-4c74-a101-02a611140408.md))

## Id

d2f4d5f9-4d9d-4bcc-9ac9-c1f834e6005f

## Local identifier



## Visibility

open_to_public

## State

published

## Created at

2021-10-13T13:29:41.634484Z

## Updated at

2022-10-02T17:01:29.103855Z

## Published at

2021-11-16T10:30:53.901832Z

## Doi



## First published url

https://doi.org/10.1380/jsssj.17.38

## Date published

2011-06-10

## Recorded date published

1996

## Resource type

journal_article

## Manuscript type

authors_original

## Collection



## Title

- title: Auger Depth Profiling Analyses of InP/GaInAsP Multilayers
  title_type: original
  lang: en

## Description

- description: "We have investigated the dependence of the depth resolution of Auger
    depth profiles of InP/GaInAsP multilayer specimens on the sputtering rate, and
    the surface roughness caused by the ion bombardment. Ar ions having energies of
    1.0 and 3.0 kV were used for the sputtering. The depth resolution of the measured
    Auger depth profiles was improved by increasing the sputtering rate.\r\nThus we
    obtained, by 3.0 kV Ar ion sputtering, excellent Auger depth profiles with constant
    depth resolution from the outermost surface of the samples. We found that the
    obtained depth resolutions of the trailing edge group were largely different from
    those of leading edges in several specimens.\r\nWe also found that the resulting
    resolution of Auger depth profiles could be determined by the surface roughness
    caused by the Ar ion sputtering."
  description_type: abstract
  lang: en

## Creator

- name: OGIWARA, Toshiya
  role: author
  orcid: https://orcid.org/0000-0002-7376-6571
- name: TANUMA, Shigeo
  role: author
  orcid: https://orcid.org/0000-0003-2628-9941

## Contact agent



## Publisher

organization: Surface Science Society of Japan

## Managing organization



## Keyword

- subject: argon ion sputtering
  schema: not_defined
- subject: InP/GaInAsP multilayer specimens
  schema: not_defined
- subject: Auger depth profiling analysis
  schema: not_defined

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## Specimen



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## Fileset

- id: 5b55a30b-7aa1-4c74-a101-02a611140408
  filename: 表面科学_17_1996_38.pdf
  content_type: application/pdf
  size: 7024520
  md5: e7d9c0687a11e30c5d916a239a582c79

## Thumbnail

fileset_id: 5b55a30b-7aa1-4c74-a101-02a611140408
filename: 表面科学_17_1996_38.pdf